Thin-Film Inductor for Gigahertz Band with CoFeSiO-SiO2 Multilayer Granular Films and its Application for Power Amplifier Module

IEEE Transactions on Magnetics

Volumn 39, Issue 5 II, 2003, Pages 3057-3061

  Ikeda, K ^a   Kobayashi, K ^a   Ohta, K ^a   Kondo, R ^a   Suzuki, T ^a   Fujimoto, M ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

Choke inductor; Magnetic film; Power amplifier module; Thin film inductor

Indexed keywords

COBALT ALLOYS; CODE DIVISION MULTIPLE ACCESS; ELECTRIC INDUCTORS; GRANULAR MATERIALS; MAGNETIC ANISOTROPY; MAGNETIZATION; POWER AMPLIFIERS;

GRANULAR FILMS;

MAGNETIC THIN FILMS;

EID: 0141884067     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2003.815893     Document Type: Article

References (21)

1. M. Fujimoto, S. Sekiguchi, H. Takahashi, M. Nakazawa, and N. Narita, "New Laser processing for ceramic multilayer components and modules," J. Ceram. Soc. Jpn., vol. 108, pp. 807-812, Sept. 2000.
2. M. Fujimoto, "Inner-stress induced by Cu metal precipitation at grain boundaries in low-temperature fired Ni-Zn-Cu ferrite," J. Amer. Ceram. Soc., vol. 77, pp. 2873-2878, Nov. 1994.
3. _, "Cu multiply twinned particle precipitation in low temperature fired Ni-Zn-Cu ferrite," Jpn. J. Appl. Phys., vol. 32, pp. 5532-5536, Dec. 1993.
4. M. Fujimoto, T. Suzuki, Y. Nishi, K. Arai, and S. Sekiguchi, "Coherent precipitation of metal copper in low-temperature-fired Ni-Zn-Cu ferrite," J. Amer. Ceram. Soc., vol 81, pp. 2477-2480, Sept. 1998.
5. E. W. Mehal and R. W. Wacker, "GaAs integrated microwave circuits, "IEEE J. Solid-Stale Circuits, vol. SC-3, pp. 117-123. Feb. 1968.
6. 1-x and CoFeB films for RF application," Trans. Magn. Soc. Jpn., vol. 2, pp. 388-393, Dec. 2002.
7. B. Viala, O. Valls, P. Gaud, M. Aid, A. S. Royet, R. Cuchet, D. Damiani, M. Ledieu, and O. Acher, "High frequency magnetic properties of CoZrNb thin films deposited by dynamic sputtering technique for GHz Si-integrated planar inductors," Trans. Magn. Soc. Jpn., vol. 2, pp. 384-387, Dec. 2002.
8. H. Karamon, T. Masumoto, and Y. Makino, "Magnetic and electrical properties of Fe-B-N amorphous films," J. Appl. Phys., vol. 57, pp. 3527-3532, Jan. 1985.
9. H. Fujimori, "Structure and 100MHz soft magnetic properties in multilayers and granular thin films," Scripta Metal. Mater., vol. 33. pp. 1625-1636, Oct. 1995.
10. S. Ohnuma, H. Fujimori, S. Mitani, and T. Masumoto, "High-frequency magnetic properties in metal-nonmetal granular films," J. Appl. Phys., vol. 79. pp. 5130-5135, Aug. 1996.
11. Y. Hayakawa, A. Makino, H. Fujimori, and A. Inoue, "High resistive nanocrystalline Fe-M-O (M = Hf, Zr, rare-earth metals) soft magnetic films for high-frequency applications," J. Appl. Phys., vol. 81, pp. 3747-3752, Aug. 1997.
12. T. Morikawa, M. Suzuki, and Y. Taga, "Soft magnetic properties of Co-Cr-O granular films," J. Magn. Soc. Jpn., vol. 23. pp. 234-239, Jan. 1999.
13. M. Yamaguchi, M. Baba, and K. I. Arai, "Sandwich-type ferromagnetic RF integrated inductor," IEEE Trans. Microwave Theory Tech., vol. 49, pp. 2331-2335, Dec. 2001.
14. M. Yamaguchi, K. Suezawa, K. I. Arai, Y. Takahashi, S. Kikuchi, Y. Shimada, W. D. Li, S. Tanabe, and K. Ito, "Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region," J. Appl. Phys., vol. 85. pp. 7919-7922, Nov. 1999.
15. A. M. Crawford, D. Gardner, and S. X. Wang, "Fabrication and comparison of broad-band inductors with one and two Co-based amorphous ground planes," Trans. Magn. Soc. Jpn., vol. 2. pp. 357-360, Dec. 2002.
16. K. Kobayashi, R. Kondo, K. Ikeda, and M. Fujimoto, "New ferromagnetic thin film inductor for high-frequency applications," J. Ceram. Soc. Jpn., vol. 110, pp. 432-435. May 2002.
17. K. Ikeda, K. Kobayashi, and M. Fujimoto, "Multilayer nanogranular magnetic thin films for GHz applications," J. Appl. Phys., vol. 92, pp. 5395-5400, Nov. 2002.
18. K. Ota, F. lizuka, M. Satomi, M. Yasuda, K. Nakajima, T. Ogino, and M. Fujimoto, "Advanced microwave integrated circuits with ceramic integration technologies," J. Ceram. Soc. Jpn., vol. 110, pp. 436-439, May 2002.
19. 3 thin film capacitors for microwave circuits," J. Ceram. Soc. Jpn., vol. 110, pp. 408-415, May 2002.
20. Y. Nishi, Y. Matsushita, Y. Iwazaki, and M. Fujimoto, "Local microscopic observation of passive integrated circuits by focused ion beam system," J. Ceram. Soc. Jpn., vol. 110, pp. 440-443, May 2002.
21. H. Masuda and M. Fujimoto, "Interconnection technology for new type thin film modules," J. Ceram. Soc. Jpn., vol. 110. pp. 485-487, May 2002.