Involvement of iron-phosphorus complexes in iron gettering for n-type silicon

Physica Status Solidi (A) Applications and Materials Science

Volumn 203, Issue 4, 2006, Pages 786-791

  Mchedlidze, T ^a   Kittler, M ^a  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

IRON-PHOSPHORUS COMPLEXES; PHOSPHORUS (P) DIFFUSION GETTERING (PDG); VACANCY-PHOSPHORUS;

COMPLEXATION; DIFFUSION; IRON; PHOSPHORUS; RESONANCE; SILICON;

IRON COMPOUNDS;

EID: 33645341430     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200564512     Document Type: Conference Paper

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