An iron-phosphorus pair in silicon

Journal of Physics Condensed Matter

Volumn 16, Issue 8, 2004, Pages

  Mchedlidze, Teimuraz ^a   Suezawa, Masashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIVACANCY; HYPERFINE STRUCTURE; ISOCHRONAL ANNEALING;

ANNEALING; DOPING (ADDITIVES); ELECTRON IRRADIATION; ISOTOPES; MICROSTRUCTURE; MOLECULAR ORIENTATION; PARAMAGNETIC RESONANCE; SIGNAL DETECTION; SIGNAL TO NOISE RATIO; SILICON;

PHOSPHORUS COMPOUNDS;

EID: 1642319475     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/16/8/L02     Document Type: Article

References (16)

1. Istratov A A, Heislmair H and Weber E R 1999 Appl. Phys. A 69 13
2. Ammerlaan C A J 1989 Soils State Phenom. 6/7 591
3. Zhao S, Assali L V C, Justo J F, Gilmer G H and Kimerling L C 2001 J. Appl. Phys. 90 2744
4. Takahashi H, Suezawa M and Sumino K 1995 J. Appl. Phys. 78 3077
5. Hohne M et al 1994 Phys. Rev. B 49 16999
6. Gilles D, Schroter W and Bergholz W 1990 Phys. Rev. B 41 5770
7. Beeler F, Andersen O K and Scheffler M 1990 Phys. Rev. B 41 1603
8. Weyer G et al 1997 Mater. Sci. Forum 258-63 437
9. Mchedlidze T and Suezawa M 2002 Japan. J. Appl. Phys. 41 7288
10. Kaminski P et al 2003 Japan. J. Appl. Phys. 42 5415
11. Muller S H, Tuynman G M, Sieverts E G and Ammerlaan C A J 1982 Phys. Rev. B 25 25
12. Mchedlidze T and Suezawa M 2003 Physica B 340-342 C 556
13. Fukata N, Mchedlidze T, Suezawa M, Saito K and Kasuya A 2002 Phys. Rev. B 66 235209
14. Wathins G D 2000 Mater. Sci. Semicond. Process. 3 227
15. Zhan X D and Watkins G D 1993 Phys. Rev. B 47 6363
16. Sieverts E G and Ammerlaan C A J 1977 Inst. Phys. Conf. Ser. 31 213