Formation and properties of iron-phosphorus and iron-phosphorus-hydrogen complexes in silicon

Solid State Phenomena

Volumn 108-109, Issue , 2005, Pages 379-384

  McHedlidze, Teimuraz ^a  

^a BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Defects in Si; Hydrogen related defects; Iron containing defects; Iron donor complexes

Indexed keywords

ATOMS; DEFECTS; ELECTRON SPIN RESONANCE SPECTROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; SILICON;

DONOR COMPLEXES; HYDROGEN ATOMS; HYDROGEN COMPLEXES; HYDROGEN RELATED DEFECTS; HYPERFINE STRUCTURE; IRON-CONTAINING; PHOSPHORUS ATOM; SILICON SAMPLES;

IRON COMPOUNDS;

EID: 33645343524     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.108-109.379     Document Type: Conference Paper

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