Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1640-1649

  Deumié, Carole ^a   Gilbert, Oliver ^a   Georges, Gaelle ^a   Arnaud, Laurent ^a   Amra, Claude ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT POLARIZATION; LIGHT SCATTERING; PHASE TRANSITIONS; SURFACE ROUGHNESS; THRESHOLD ELEMENTS;

OPTICAL QUALITY; POLARIZATION MODULATOR; TRANSITION LAYERS;

ELECTROMAGNETIC WAVES;

EID: 33645306579     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001640     Document Type: Article

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