Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry

Applied Physics Letters

Volumn 68, Issue 20, 1996, Pages 2837-2839

  Fang, S J ^a   Chen, W ^a   Yamanaka, T ^a   Helms, C R ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000376445     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116341     Document Type: Article

References (19)

1. R. H. Bridgham and S. M. Baumann, Symp. Proc. Electrochem. Soc. PV 94-9, 277 (1994).
2. S. D. Halepete, H. C. Lin, S. J. Fang, and C. R. Helms, Mater. Res. Soc. Symp. Proc. INS 386, 383 (1995).
3. I. Ohlidal, F. Luke, and K. Navratil, Surf. Sci. INS 45, 91 (1974).
4. S. M. F. Nee, Appl. Opt. AIP 27, 2819 (1988).
5. J. R. Blanco and M. J. McMarr, Appl. Opt. AIP 30, 3210 (1991).
6. N. V. Nguyen, D. Chandler-Horowitz, P. M. Amirtharaj, and J. G. Pellegrino, Appl. Phys. Lett. AIP 64, 2688 (1994).
7. 2 Interface 2, edited by C. R. Helms and B. E. Deal (Plenum, New York, 1993), p. 299.
8. L. Spanos, Q. Liu, E. A. Irene, T. Zettler, B. Hornung, and J. J. Wortman, J. Vac. Sci. Technol. A AIP 12, 2653 (1994).
9. T. Suuki and S. Adachi, Jpn. J. Appl. Phys. INS 33, 5599 (1994).
10. Q. Liu, L. Spanos, C. Zhao, and E. A. Irene, J. Vac. Sci. Technol. A AIP 13, 1977 (1995).
11. H. Resinger, Solid-State Electron. INS 35, 333 (1992).
12. D. E. Aspnes, J. B. Theeten, and F. Hottier, Phys. Rev. B AIP 20, 3292 (1979).
13. G. E. Jellison, Thin Solid Films INS 206, 294 (1991).
14. A. Kalintsky, S. P. Tay, J. P. Ellul, S. Chongsawangvirod, J. W. Andrews, and E. A. Irene, J. Electrochem. Soc. INS 137, 234 (1990).
15. S. Chongsawangvirod, E. A. Irene, A. Kalintsky, S. P. Tay, and T. P. Ellul, J. Electrochem. Soc. INS 137, 3537 (1990).
16. V. Nayar, C. Pickering, and A. M. Hodge, Thin Solid Films INS 195, 185 (1991).
17. T. S. Chao, C. L. Lee, and T. F. Lei, J. Electrochem. Soc. INS 138, 1756 (1991).
18. A. Szekeres, K. Christova, and A. Paneva, Philos. Mag. B INS 65, 961 (1992).
19. N. Gonon, A. Gagnaire, D. Barbier, and A. Glachant, J. Appl. Phys. AIP 76, 5242 (1994).