Ellipsometry of light scattering from multilayer coatings

Applied Optics

Volumn 35, Issue 28, 1996, Pages 5600-5608

  Deumie C ^a   Giovannini, H ^a   Amra, C ^a  

^a CNRS   (France)

Author keywords

Bulk inhomogeneity; Cross correlation; Ellipsometry; Localized defects; Optical coatings; Polarization ratio; Scattering; Surface roughness; Thin films

Indexed keywords

DEFECTS; ELECTROMAGNETIC FIELD THEORY; INVERSE PROBLEMS; LIGHT POLARIZATION; LIGHT SCATTERING; MAXWELL EQUATIONS; MULTILAYERS; OPTICAL COATINGS; SURFACES; THIN FILMS;

BULK INHOMOGENEITY; CROSS CORRELATION; LOCALIZED DEFECTS; POLARIZATION RATIO; SCATTEROMETERS;

ELLIPSOMETRY;

EID: 0030269610     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005600     Document Type: Article

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