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Volumn 42, Issue 6, 2003, Pages 960-971

Optimized metrology for laser-damage measurement: Application to multiparameter study

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; IMAGE PROCESSING; MEASUREMENTS; OPTIMIZATION;

EID: 0037455666     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.000960     Document Type: Article
Times cited : (89)

References (39)
  • 1
    • 0020847647 scopus 로고
    • Laser-induced (1.064-µm) damage threshold measurement at the GEC research laboratories, Hirst Research Centre
    • R. M. Wood and R. J. Chad, “Laser-induced (1.064-µm) damage threshold measurement at the GEC research laboratories, Hirst Research Centre,” Appl. Opt. 23, 3779-3781 (1984).
    • (1984) Appl. Opt. , vol.23 , pp. 3779-3781
    • Wood, R.M.1    Chad, R.J.2
  • 2
    • 0001522216 scopus 로고
    • Onset threshold analysis of defect-driven surface and bulk laser damage
    • R. M. O’Connell, “Onset threshold analysis of defect-driven surface and bulk laser damage,” Appl. Opt. 31, 4143-4153 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 4143-4153
    • O’connell, R.M.1
  • 3
    • 0031289980 scopus 로고    scopus 로고
    • Localized laser damage test facility at LOSCM: Real time
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 3244
    • J. Y. Natoli, P. Volto, M. Pommies, G. Albrand, and C. Amra, “Localized laser damage test facility at LOSCM: real time optical observation and quantitative AFM study,” in Laser-Induced Damage in Optical Materials: 1997, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 3244, 76-85 (1998).
    • (1998) Laser-Induced Damage in Optical Materials: 1997 , pp. 76-85
    • Natoli, J.Y.1    Volto, P.2    Pommies, M.3    Albrand, G.4    Amra, C.5
  • 4
    • 0034840551 scopus 로고    scopus 로고
    • A quantitative study of laser damage probabilities in silica and calibrated liquids: Comparison with theoretical prediction
    • G. Exar-hos, A. Guenther, M. Kozlowski, K. Lewis, and M. Soileau, eds., Proc. SPIE 4347
    • J. Y. Natoli, L. Gallais, H. Akhouayri, and C. Amra, “A quantitative study of laser damage probabilities in silica and calibrated liquids: comparison with theoretical prediction,” in Laser-Induced Damage in Optical Materials: 2000, G. Exar-hos, A. Guenther, M. Kozlowski, K. Lewis, and M. Soileau, eds., Proc. SPIE 4347, 295-305 (2001).
    • (2001) Laser-Induced Damage in Optical Materials: 2000 , pp. 295-305
    • Natoli, J.Y.1    Gallais, L.2    Akhouayri, H.3    Amra, C.4
  • 5
    • 0032094455 scopus 로고    scopus 로고
    • Single-shot measurement of laser-induced damage thresholds of thin films coatings
    • F. Loewenthal, R. Tommasini, and J. E. Balmer, “Single-shot measurement of laser-induced damage thresholds of thin films coatings,” Opt. Commun. 152, 168-174 (1998).
    • (1998) Opt. Commun. , vol.152 , pp. 168-174
    • Loewenthal, F.1    Tommasini, R.2    Balmer, J.E.3
  • 6
    • 0022955266 scopus 로고
    • Automated pulsed testing using a scatter-probe damage monitor
    • H. E. Bennett, A. H. Guenther, D. Milam, and B. E. Newnam, eds., Natl. Bur. Stand. (U.S.) Spec. Publ. 727
    • J. B. Franck, S. C. Seitel, V. A. Hodgkin, W. N. Faith, and J. O. Porteus, “Automated pulsed testing using a scatter-probe damage monitor,” in Damage in Laser Materials: 1984, H. E. Bennett, A. H. Guenther, D. Milam, and B. E. Newnam, eds., Natl. Bur. Stand. (U.S.) Spec. Publ. 727, 71-76 (1986).
    • (1986) Damage in Laser Materials: 1984 , pp. 71-76
    • Franck, J.B.1    Seitel, S.C.2    Hodgkin, V.A.3    Faith, W.N.4    Porteus, J.O.5
  • 7
    • 0000267113 scopus 로고    scopus 로고
    • The CMO YAG laser damage test facility
    • A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2714
    • J. Hue, J. Dijon, and P. Lyan, “The CMO YAG laser damage test facility,” in Laser-Induced Damage in Optical Materials: 1995, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2714, 102-113 (1996).
    • (1996) Laser-Induced Damage in Optical Materials: 1995 , pp. 102-113
    • Hue, J.1    Dijon, J.2    Lyan, P.3
  • 8
    • 0033877801 scopus 로고    scopus 로고
    • Automated damage onset analysis techniques applied to KDP damage and the Zeus small area damage test facility
    • G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3902
    • R. Sharp III and M. Runkel, “Automated damage onset analysis techniques applied to KDP damage and the Zeus small area damage test facility,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3902, 361-368 (2000).
    • (2000) Laser-Induced Damage in Optical Materials: 1999 , pp. 361-368
    • Sharp, R.1    Runkel, M.2
  • 9
    • 0025498843 scopus 로고
    • Automated damage testing facility for excimer laser optics
    • Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Natl. Inst. Stand. Technol. (U.S.) Spec. Publ. 1438
    • K. Mann and H. Gerhardt, “Automated damage testing facility for excimer laser optics,” in Laser-Induced Damage in Optical Materials: 1989, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Natl. Inst. Stand. Technol. (U.S.) Spec. Publ. 1438, 39-46 (1989).
    • (1989) Laser-Induced Damage in Optical Materials: 1989 , pp. 39-46
    • Mann, K.1    Gerhardt, H.2
  • 12
    • 84975566398 scopus 로고
    • Multipulse laser-induced damage phenomena in silicates
    • D. Kitriotis and L. D. Merkle, “Multipulse laser-induced damage phenomena in silicates,” Appl. Opt. 28, 949 -958 (1989).
    • (1989) Appl. Opt , vol.28
    • Kitriotis, D.1    Merkle, L.D.2
  • 13
    • 0029546355 scopus 로고
    • Diagnostics for the detection and evaluation of laser induced damage
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2428
    • L. Sheehan, M. Kozlowski, and F. Rainer, “Diagnostics for the detection and evaluation of laser induced damage,” in Laser-Induced Damage in Optical Materials: 1994, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2428, 13-22 (1995).
    • (1995) Laser-Induced Damage in Optical Materials: 1994 , pp. 13-22
    • Sheehan, L.1    Kozlowski, M.2    Rainer, F.3
  • 15
    • 0032682141 scopus 로고    scopus 로고
    • Beam characterization: Application to the laser damage threshold
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 3578
    • J. Hue, J. Dijon, P. Garrec, L. Poupinet, and P. Lyan, “Beam characterization: application to the laser damage threshold,” in Laser-Induced Damage in Optical Materials: 1998, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 3578, 633-644 (1999).
    • (1999) Laser-Induced Damage in Optical Materials: 1998 , pp. 633-644
    • Hue, J.1    Dijon, J.2    Garrec, P.3    Poupinet, L.4    Lyan, P.5
  • 17
    • 0021597350 scopus 로고
    • Spotsize effects in laser damage testing
    • H. E. Bennett, A. H. Guenther, D. Milam, and B. E. Newnam, eds., Natl. Bur. Stand. (U.S.) Spec. Publ. 669
    • S. R. Foltyn, “Spotsize effects in laser damage testing,” in Damage in Laser Materials: 1982, H. E. Bennett, A. H. Guenther, D. Milam, and B. E. Newnam, eds., Natl. Bur. Stand. (U.S.) Spec. Publ. 669, 368-379 (1983).
    • (1983) Damage in Laser Materials: 1982 , pp. 368-379
    • Foltyn, S.R.1
  • 18
    • 0015614515 scopus 로고
    • Laser-induced damage probability at 1.06 am and 0.69 am
    • M. Bass and H. H. Barrett, “Laser-induced damage probability at 1.06 am and 0.69 am,” Appl. Opt. 12, 690-699 (1973).
    • (1973) Appl. Opt. , vol.12 , pp. 690-699
    • Bass, M.1    Barrett, H.H.2
  • 20
    • 0034847994 scopus 로고    scopus 로고
    • Cw and nano-second laser irradiation on materials: Elements of comparison of thermal effects
    • G. Exarhos, A. Guenther, M. Kozlowski, K. Lewis, and M. Soileau, eds., Proc. SPIE 4347
    • L. Gallais, J. Y. Natoli, H. Akhouayri, and C. Amra, “cw and nano-second laser irradiation on materials: elements of comparison of thermal effects,” in Laser-Induced Damage in Optical Materials: 2000, G. Exarhos, A. Guenther, M. Kozlowski, K. Lewis, and M. Soileau, eds., Proc. SPIE 4347, 502-508 (2001).
    • (2001) Laser-Induced Damage in Optical Materials: 2000 , pp. 502-508
    • Gallais, L.1    Natoli, J.Y.2    Akhouayri, H.3    Amra, C.4
  • 21
    • 0036602853 scopus 로고    scopus 로고
    • Laser-induced damage of materials in bulk, thin film, and liquid forms
    • J. Y. Natoli, L. Gallais, H. Akhouayri, and C. Amra, “Laser-induced damage of materials in bulk, thin film, and liquid forms,” Appl. Opt. 41, 3156-3166 (2002).
    • (2002) Appl. Opt. , vol.41 , pp. 3156-3166
    • Natoli, J.Y.1    Gallais, L.2    Akhouayri, H.3    Amra, C.4
  • 24
    • 0000447968 scopus 로고
    • Surface laser damage thresholds determined by photoacoustic deflection
    • S. Petzold, A. Elg, M. Reichling, J. Reif, and E. Matthias, “Surface laser damage thresholds determined by photoacoustic deflection,” Appl. Phys. Lett. 53, 2005-2007 (1988).
    • (1988) Appl. Phys. Lett. , vol.53 , pp. 2005-2007
    • Petzold, S.1    Elg, A.2    Reichling, M.3    Reif, J.4    Matthias, E.5
  • 25
    • 0035926810 scopus 로고    scopus 로고
    • Ultrasonic monitoring of laser damage in fused silica
    • L. Martin, A. M. Norton, and G. Thomas, “Ultrasonic monitoring of laser damage in fused silica,” Appl. Phys. Lett. 78, 3403-3405 (2001).
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 3403-3405
    • Martin, L.1    Norton, A.M.2    Thomas, G.3
  • 26
    • 85166280958 scopus 로고
    • Scattered light as laser damage diagnostic
    • H. E. Bennett, A. H. Guenther, D. Milam, B. E. Newnam, and M. J. Soileau, eds., Natl. Inst. Stand. Technol. (U.S.) Spec. Publ. 756
    • A. F. Stewart and A. H. Guenther, “Scattered light as laser damage diagnostic,” in Damage in Laser Materials: 1987, H. E. Bennett, A. H. Guenther, D. Milam, B. E. Newnam, and M. J. Soileau, eds., Natl. Inst. Stand. Technol. (U.S.) Spec. Publ. 756, 142-150 (1988).
    • (1988) Damage in Laser Materials: 1987 , pp. 142-150
    • Stewart, A.F.1    Guenther, A.H.2
  • 27
    • 0000045035 scopus 로고    scopus 로고
    • Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2966
    • 2multilayer mirror and polarizer coatings,” in Laser-Induced Damage in Optical Materials: 1996, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 2966, 273-281 (1997).
    • (1997) Laser-Induced Damage in Optical Materials: 1996 , pp. 273-281
    • Genin, F.Y.1    Stolz, C.J.2    Kozlowski, M.R.3
  • 28
    • 0032635462 scopus 로고    scopus 로고
    • Extrapolation of test data to predict performance of large-area NIF optics at 355 nm
    • H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 3578
    • M. D. Feit, A. M. Rubenchik, M. R. Kozlowski, F. Y. Genin, S. Schwartz, and L. M. Sheehan, “Extrapolation of test data to predict performance of large-area NIF optics at 355 nm,” in Laser-Induced Damage in Optical Materials: 1998, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 3578, 226-234 (1999).
    • (1999) Laser-Induced Damage in Optical Materials: 1998 , pp. 226-234
    • Feit, M.D.1    Rubenchik, A.M.2    Kozlowski, M.R.3    Genin, F.Y.4    Schwartz, S.5    Sheehan, L.M.6
  • 30
    • 0000592671 scopus 로고    scopus 로고
    • Densification of fused silica due to shock waves and its implications for 351 nm laser induced damage
    • A. Kubota, M.-J. Caturla, J. Stolken, and M. Feit, “Densification of fused silica due to shock waves and its implications for 351 nm laser induced damage,” Opt. Express 24, 611-616 (2001), http://www.opticsexpress.org.
    • (2001) Opt. Express , vol.24 , pp. 611-616
    • Kubota, A.1    Caturla, M.-J.2    Stolken, J.3    Feit, M.4
  • 31
    • 0000974673 scopus 로고    scopus 로고
    • Crack arrest and stress dependence of laser-induced surface damage in fused-silica and borosilicate glass
    • F. Dahmani, J. C. Lambropoulos, A. W. Schmid, S. Papernov, and S. J. Burns, “Crack arrest and stress dependence of laser-induced surface damage in fused-silica and borosilicate glass,” Appl. Opt. 38, 6892-6903 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 6892-6903
    • Dahmani, F.1    Lambropoulos, J.C.2    Schmid, A.W.3    Papernov, S.4    Burns, S.J.5
  • 33
    • 0033878779 scopus 로고    scopus 로고
    • Refined statistical measurements of laser damage
    • G. J. Ex-arhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3902
    • P. Volto, A. Roussel, C. Cordillot, D. Bernardino, and H. Ber-cegol, “Refined statistical measurements of laser damage,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Ex-arhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3902, 332-338 (2000).
    • (2000) Laser-Induced Damage in Optical Materials: 1999 , pp. 332-338
    • Volto, P.1    Roussel, A.2    Cordillot, C.3    Bernardino, D.4    Ber-Cegol, H.5
  • 34
    • 34247349088 scopus 로고
    • Pulse-width and focal-volume dependence of laser-induced breakdown
    • E. W. Van Stryland, M. J. Soileau, A. L. Smirl, and W. E. Williams, “Pulse-width and focal-volume dependence of laser-induced breakdown,” Phys. Rev. B 23, 2144-2151 (1981).
    • (1981) Phys. Rev. B , vol.23 , pp. 2144-2151
    • Van Stryland, E.W.1    Soileau, M.J.2    Smirl, A.L.3    Williams, W.E.4
  • 36
    • 2242493163 scopus 로고
    • Avalanche breakdown and the probabilistic nature of laser-induced damage
    • M. Bass and H. H. Barrett, “Avalanche breakdown and the probabilistic nature of laser-induced damage,” IEEE J. Quantum Electron. 8, 338-343 (1972).
    • (1972) IEEE J. Quantum Electron. , vol.8 , pp. 338-343
    • Bass, M.1    Barrett, H.H.2
  • 37
    • 0000311501 scopus 로고
    • Temperature dependence of laser-induced bulk damage in SIO2 and borolilicate glass
    • 2and borolilicate glass,” Phys. Rev. B 38, 1473-1482 (1988).
    • (1988) Phys. Rev. B , vol.38 , pp. 1473-1482
    • Merkle, L.F.D.1    Kitriotis, D.2
  • 38
    • 0033872191 scopus 로고    scopus 로고
    • Laser-induced bulk damage in various types of vitreous silica
    • G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3902
    • N. Kuzuu, N. Umemura, A. Nagafuchi, K. Yagi, K. Ochi, and K. Yoshida, “Laser-induced bulk damage in various types of vitreous silica,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, and M. J. Soileau, eds., Proc. SPIE 3902, 398 -405 (2000).
    • (2000) Laser-Induced Damage in Optical Materials: 1999
    • Kuzuu, N.1    Umemura, N.2    Nagafuchi, A.3    Yagi, K.4    Ochi, K.5    Yoshida, K.6
  • 39
    • 0031244801 scopus 로고    scopus 로고
    • Fatigue laser-induced damage in transparent materials
    • A. E. Chmel, “Fatigue laser-induced damage in transparent materials,” Mater. Sci. Eng. B 49, 175-190 (1997).
    • (1997) Mater. Sci. Eng. B , vol.49 , pp. 175-190
    • Chmel, A.E.1


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