Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 616-620

  Bartzsch, H ^a   Lange, S ^a   Frach, P ^a   Goedicke, K ^a  

^a Fraunhofer Institute for Electron Beam and Plasma Technology   (Germany)

Author keywords

Antireflective coating; Optical coating; Pulse magnetron sputtering; Reactive sputtering; Rugate filter

Indexed keywords

GRADIENT INDEX OPTICS; MAGNETRON SPUTTERING; MIXTURES; NITROGEN; OXYGEN; PLASMA APPLICATIONS; REFRACTIVE INDEX;

COMPOUND FILMS; REACTIVE GAS;

ANTIREFLECTION COATINGS;

COATING;

EID: 1842664955     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.105     Document Type: Article

References (12)

1. Schiller S. Goedicke K. Reschke J. Kirchhoff V. Schneider S. Milde F. Surf. Coat. Technol. 61 1993 331-337
2. Bartzsch H. Frach P. Goedicke K. Gottfried Chr. Surf. Coat. Technol. 120-121 1999 723-727
3. Oulette M.F. Lang R.V. Yan K.L. Bertram R.W. Owles R.S. J. Vac. Sci. Technol. A 9 1991 1188-1192
4. Tang Q. Ogura S. J. Vac. Sci. Technol. A 15 1997 2670-2672
5. Gunning W.J. Hall R.L. Woodberry F.J. Southwell W.H. Gluck N.S. Appl. Optics 28-14 1989 2945-2948
6. Bulkin P.V. Swart P.L. Lacquet B.M. Chtcherbakov A.A. SPIE 2776 1996 126-136
7. Frach P. Gottfried Chr. Bartzsch H. Goedicke K. Surf. Coat. Technol. 90 1997 75-81
8. Thetford A. Opt. Acta 16 1969 37-44
9. Abeleles F. Ann. Phys. 12 1950 596-640
10. H.J. Kühn, Dissertation A, Friedrich-Schiller-Universität Jena, 1989, pp. 35-37
11. Placido F. Russell J. Gou Z. SPIE 2776 1996 159-168
12. Southwell W.H. J. Opt. Soc. Am. A 5 9 1988 1558-1564