Amorphous silicon two-color microbolometer for uncooled IR detection

IEEE Sensors Journal

Volumn 6, Issue 2, 2006, Pages 293-300

  Almasri, Mahmoud ^a,b,d   Xu, Bai ^a,c,d   Castracane, James ^c,e,f  

^a IEEE   (United States)

^b University of Missouri   (United States)

^c STATE UNIVERSITY OF NEW YORK   (United States)

^d SPIE ^*  (United States)

^e State University of New York   (United States)

^f New York State Center for Advanced Technology in Nanomaterials and Nanoelectronics   (United States)

Author keywords

Amorphous silicon; Microbolometer; Microelectromechanical systems (MEMS); Simulation; Uncooled IR detection

Indexed keywords

ELECTROSTATIC VOLTAGE; MICROBOLOMETER; SI3N4; UNCOOLED IR DETECTION;

AMORPHOUS SILICON; DETECTORS; ELECTRIC RESISTANCE; ENERGY ABSORPTION; HEAT CONDUCTION; INFRARED DETECTORS; LIGHT ABSORPTION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NICKEL COMPOUNDS; SIMULATION; SPECTRUM ANALYZERS; SUBSTRATES;

SENSORS;

EID: 33645163068     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.870139     Document Type: Article

References (29)

1. T. Breen, M. Kohin, C. A. Marshall, R. Murphy, T. White, A. L. Leary, and T. Parker, "Even more applications of uncooled microbolometer sensors," Proc. SPIE, vol. 3698, pp. 308-318, 1999.
2. T. Breen, N. Butler, M. Kohin, C. A. Marshall, R. Murphy, T. Parker, N. Piscitelli, and R. Silva, "A summary of applications of uncooled microbolometer sensors," in Proc. IEEE Aerosp. Conf., vol. 3, 1999, pp. 361-374.
3. R. A. Wood and N. A. Foss, "Micromachined bolometer arrays achieve low-cost imaging," Laser Focus World, pp. 101-106, Jun. 1993.
4. "Proc. SPIE,", 1998.
5. R. Murphy, M. Kohin, B. Backer, N. Butler, R. Blackwell, and T. Allen, "Recent development in uncooled IR technology," Proc. SPIE, vol. 4028, pp. 12-16, 2000.
6. V. Leonov and D. Butler, "Two-color thermal detector with thermal chopping for infrared focal-plane arrays," Appl. Opt., vol. 40, no. 16, pp. 2601-2610, 2001.
7. E. L. Dereniak and G. D. Boreman. Infrared Detectors and Systems. New York: Wiley, 1996.
8. P. W. Kruse and D. D. Skatrud, "Uncooled Infrared Imaging Arrays and Systems," in Semiconductors and Semimetals. New York: Academic, 1997, vol. 47, pp. 17-42.
9. P. W. Kruse, "The design of uncooled infrared imaging arrays," Proc. SPIE, vol. 2746, pp. 34-37, 1994.
10. F. N. Hooge, "1/f noise is no surface effect," Phys. Lett., to be published.
11. V. Leonov and D. Butler, "Two-color thermal detector with thermal chopping for infrared focal-plane arrays," Appl Opt., vol. 40, no. 16, pp. 2601-2610, 2001.
12. T. Schimert, D. Ratcliff, J. Brady, S. Ropson, R. Gooch, B. Ritchey, P. McCardel, K. Rachels, M. Wand, M. Weinstein, and J. Wynn, "Low cost, low power uncooled a:Si based micro infrared camera for unattended ground sensor applications," Proc. SPIE, vol. 3713, pp. 101-111, 1999.
13. M. Almasri, Z. Çelik-Butler, D. P. Butler, A. Yaradanakul, and A. Yildiz, "Uncooled multimirrors broad-band infrared microbolometers," J. Microelectromech. Syst., vol. 11, no. 5, Oct. 2002.
14. _, "YBaCuO microbolometers for broad-band IR sensing," Proc. SPIE, pp. 264-273, Apr. 2001.
15. O. Degani, E. Socher, A. Lipson, T. Leitner, D. J. Setter, S. Kaldor, and Y. Nemirovsky, "Pull-in study of an electrostatic torsion microactuator," J. Microelectromech. Syst., vol. 7, p. 373, 1998.
16. C. Vedel, J. L. Martin, J. L. Ouvrier Buffet, J. L. Tissot, M. Vilain, and J. J. Yon. "Amorphous Silicon Based Uncooled Microbolometer IRFPA," Proc. SPIE, vol. 3698, pp. 276-283, 1999.
17. K. C. Liddiard, U. Ringh, C. Jansson, and O. Reinhold, "Progress of swiedish-Australian research collaboration on uncooled smart Ir sensors," Proc. SPIE, vol. 3436, pp. 578-584, 1998.
18. E. Mottin, J. L. Martin, J. L. Ouvrier Buffet, M. Vilain, and J. J. Yon, "320 × 240 microbolometer uncooled IRFPA," Proc. SPIE, vol. 4028, pp. 40-46, 2000.
19. W. Radford, D. Murphy, M. Ray, S. Propst, A. Kennedy, J. Kojiro, J. Woolaway, K. Soch, R. Coda, G. Lung, E. Moody, D. Gleichman, and S. Baur, "320 × 240 silicon microbolometer uncooled IRFPA's with on-chip offset correction," Proc. SPIE, vol. 2746, pp. 82-93, 1996.
20. B. E. Cole, R. E. Higashi, and R. A. Wood, "Monolithic arrays of micromachined pixels for infrared application," in IEDM Tech. Dig., 1998, pp. 459-462.
21. M. S. Liu, J. S. Haviland, and C. J. Yue. "Integrated infrared sensitive bolometers," U.S. Patent 005 260 225A, 1992.
22. M. Almasri, D. P. Butler, and Z. Çelik-Butler, "Semiconducting YBCO bolometers for uncooled IR detection," in Proc. SPIE, vol. 4028, Apr. 2000, pp. 17-26.
23. J. Gray, Z. Çelik-Butler, D. P. Butler, and M. Almasri, "Semiconducting YBaCuO infrared detecting bolometers," Proc. SPIE, vol. 3436, pp. 555-565, Jul. 1998.
24. J. Wauters, "Doped silicon creates new bolometer material," Laser Focus World, pp. 145-149, 1997.
25. V. Leonov, N. A. Perova, J. Vermeiren, B. Grietens, and C. Goessens, "Optimization of design and technology for uncooled poly-SiGe microbolometer arrays," Proc. SPIE, vol. 4721, pp. 122-133, 2002.
26. A. Tanaka, S. Matsumoto, N. Tsukamoto, and N. Teranishi, "Silicon IC process compatible bolometer infrared focal plane array," presented at the 8th Int. Conf. Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995.
27. M. V. S. Ramakrishna, G. Karunasiri, U. Sridhar, and G. Chen, "Performance of titanium and amorphous Germanium microbolometer infrared detectors," Proc. SPIE, vol. 3666, pp. 415-420, 1999.
28. P. Eriksson, J. Y. Andersson, and G. Stemme, "Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors," J. Microelectromech. Syst., vol. 6, pp. 55-61, 1997.
29. M. Almasri and B. Frazier, "Micromirror arrays for high temperature operation," presented at the MRS Meeting, San Francisco, CA, Mar. 2005.