Micromirror arrays for high temperature operation

Materials Research Society Symposium Proceedings

Volumn 872, Issue , 2005, Pages 9-14

  Almasri, Mahmoud F ^a   Frazier, Bruno A ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; EPITAXIAL GROWTH; ETCHING; GLASS TRANSITION; LITHOGRAPHY; OPTIMIZATION; TORSIONAL STRESS;

DEVICE STRUCTURE; MICROMIRROR ARRAYS;

MIRRORS;

EID: 30644456860     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-872-j1.4     Document Type: Conference Paper

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