Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates

Applied Physics Letters

Volumn 88, Issue 11, 2006, Pages

  Yang, Shuo Wang ^a   Dai, Ling ^b   Chen, Xian Tong ^c   Wu, Ping ^a   Tan, V B C ^b  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ATOMIC PHYSICS; COPPER; POLYMERS; SILICON CARBIDE; TANTALUM;

ATOMIC STRUCTURES; CU DIFFUSION; SIC AMORPHOUS SUBSTRATES; TA FILM GROWTH MECHANISMS;

FILM GROWTH;

EID: 33645134305     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2186511     Document Type: Article

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