Phonon-activated electron-stimulated desorption of halogens from Si (100) - (2×1)

Physical Review B - Condensed Matter and Materials Physics

Volumn 73, Issue 12, 2006, Pages

  Trenhaile, B R ^a   Antonov, V N ^a,b   Xu, G J ^a,c   Agrawal, Abhishek ^a   Signor, A W ^a   Butera, R E ^a   Nakayama, Koji S ^a,d   Weaver, J H ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b MICRON TECHNOLOGY INC   (United States)

^c GENERAL ELECTRIC COMPANY   (United States)

^d TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33644962466     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.73.125318     Document Type: Article

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