Electron-stimulated modification of si surfaces

Physical Review Letters

Volumn 82, Issue 5, 1999, Pages 980-983

  Nakayama, Koji ^a   Weaver, J H ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DESORPTION; ELECTRON IRRADIATION; ELECTRON SCATTERING; ELECTRONIC DENSITY OF STATES; HOLE TRAPS; LOW ENERGY ELECTRON DIFFRACTION; SCANNING TUNNELING MICROSCOPY; SURFACE TREATMENT;

ADATOM LAYER VACANCIES; ELECTRON ATTACHMENT STATES; ELECTRON HOLE; ELECTRON STIMULATED MODIFICATION; INELASTIC CASCADE SCATTERING;

SEMICONDUCTING SILICON;

EID: 0033072634     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.82.980     Document Type: Article

References (28)

1. J. B. Pendry, Low Energy Electron Diffraction (Academic Press, London, 1974).
2. C. J. Powell and M. P. Seah, J. Vac. Sci. Technol. A 8, 735 (1990).
3. R. D. Ramsier and J. T. Yates, Jr., Surf. Sci. Rep. 12, 243 (1991).
4. T. E. Madey and J. T. Yates, Jr., J. Vac. Sci. Technol. 8, 525 (1971).
5. R. J. Hamers et al., Phys. Rev. B 34, 5343 (1986).
6. B. S. Swartzentruber et al., J. Vac. Sci. Technol. A 7, 2901 (1989).
7. Z. Zhang et al., Surf. Sci. 369, L131 (1996).
8. T. Uda and K. Terakura, Phys. Rev. B 53, 6999 (1996).
9. Z. Zhang et al., Phys. Rev. Lett. 74, 3644 (1995).
10. J. van Wingerden et al., Phys. Rev. B 55, 4723 (1997).
11. B. Borovsky et al., Phys. Rev. Lett. 78, 4229 (1997).
12. T. Yamasaki et al., Phys. Rev. Lett. 76, 2949 (1996).
13. R. J. Hamers et al., J. Vac. Sci. Technol. A 8, 195 (1990).
14. Y. M. Mo et al., Phys. Rev. Lett. 66, 1998 (1991).
15. Z. Zhang et al., Surf. Sci. 369, 69 (1996).
16. H. Feil et al., Phys. Rev. Lett. 69, 3076 (1992)
17. H. J. W. Zandvliet, Surf. Sci. 377–379, 1 (1997).
18. L. C. Feldman and J. W. Mayer, Fundamentals of Surface and Thin Film Analysis (Elsevier, New York, 1986), p. 131.
19. B. C. Stipe et al., Phys. Rev. Lett. 79, 4397 (1997).
20. J. Kanasaki et al., Phys. Rev. Lett. 80, 4080 (1998)
21. K. Ishikawa et al., Surf. Sci. Lett. 349, L153 (1996).
22. T.-C. Shen et al., Science 268, 150 (1995).
23. R. S. Becker et al., Phys. Rev. Lett. 65, 1917 (1990)
24. M. Schwartzkopff et al., J. Vac. Sci. Technol. B 14, 1336 (1996).
25. M. Martel et al., Science 272, 385 (1996).
26. B. Y. Han, C. Y. Cha, and J. H. Weaver, J. Vac. Sci. Technol. A 16, 490 (1998)
27. B. Y. Han, K. Nakayama, and J. H. Weaver (unpublished).
28. H.-J. Ernst et al., Science 279, 679 (1998).