Cubic boron nitride thin film growth by boron and nitrogen ion implantation

Physical Review B - Condensed Matter and Materials Physics

Volumn 72, Issue 5, 2005, Pages

  Eyhusen, S ^a   Ronning, C ^a   Hofsass H ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33644939997     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.72.054126     Document Type: Article

References (25)

1. P. M. Mirkarimi, K. F. McCarty, and D. L. Medlin, Mater. Sci. Eng. MSCEAA 0025-5416 21, 47 (1997).
2. O. Mishima, J. Tanaka, S. Yamada, and O. Fukunaga, Science SCIEAS 0036-8075 238, 181 (1987).
3. O. Mishima, K. Era, J. Tanaka, and S. Yamaoka, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.100082 53, 962 (1988).
4. H. Hofsäss, H. Feldermann, M. Sebastian, and C. Ronning, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.55.13230 55, 13230 (1997).
5. K. F. McCarty, P. B. Mirkarimi, D. L. Medlin, T. A. Friedman, and J. C. Barbour, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(96)00580-8 5, 1519 (1996).
6. J. Hahn, F. Richter, R. Pintaske, M. Röder, E. Schneider, and T. Weltzel, Surf. Coat. Technol. SCTEEJ 0257-8972 10.1016/S0257-8972(96)03178-7 92, 129 (1997).
7. D. Litvinov and R. Clarke, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.119429 71, 1969 (1997).
8. S. Eyhusen, I. Gerhards, H. Hofsäss, C. Ronning, M. Blomenhofer, J. Zweck, and M. Seibt, Diamond Relat. Mater. DRMTE3 0925-9635 12, 1877 (2003).
9. S. Eyhusen, H. Hofsäss, and C. Ronning, Thin Solid Films THSFAP 0040-6090 447-448, 125 (2004).
10. H. Hofsäss, H. Feldermann, R. Merk, M. Sebastian, and C. Ronning, Appl. Phys. A: Mater. Sci. Process. APAMFC 0947-8396 10.1007/s003390050652 66, 153 (1998).
11. H. Hofsäss, H. Feldermann, S. Eyhusen, and C. Ronning, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.65.115410 65, 115410 (2002).
12. P. Reinke, G. Francz, P. Oelhafen, and J. Ullmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.54.7067 54, 7067 (1996).
13. J. Ye, Ph.D. thesis, Kaiserslautern, 2000.
14. H. Feldermann, R. Merk, H. Hofsäss, C. Ronning, and T. Zheleva, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.123613 74, 1552 (1999).
15. H. Hofsäss and C. Ronning, in Beam Processing of Advanced Materials, edited by, J. Singh,,, S. M. Copley,, and, J. Mazumder,. Conference Proceedings of ASM (unpublished), 1996, p. 29ff.
16. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1999). See also http://www.srim.org.
17. N. E. Christensen, S. Satpathy, and Z. Pawlowska, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.36.1032 36, 1032 (1987).
18. N. Deyneka, X. W. Zhang, H.-G. Boyen, P. Ziemann, and F. Banhart, Diamond Relat. Mater. DRMTE3 0925-9635 13, 473 (2004).
19. X. W. Zhang, H.-G. Boyen, P. Ziemann, M. Ozawa, F. Banhart, and M. Schreck, Diamond Relat. Mater. DRMTE3 0925-9635 13, 1144 (2004).
20. N. Deyneka, X. W. Zhang, H.-G. Boyen, P. Ziemann, W. Fukarek, O. Kruse, and W. Möller, Diamond Relat. Mater. DRMTE3 0925-9635 12, 37 (2003).
21. H. Quintel, K. Bharuth-Ram, H. Hofsäss, M. Restle, and C. Ronning, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/0168-583X(95)01195- 1 118, 72 (1996).
22. L. Allers, A. T. Collins, and J. Hiscock, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(97)00161-1 7, 228 (1998).
23. C. Ronning, E. Dreher, H. Feldermann, M. Gross, M. Sebastian, and H. Hofsäss, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(97) 00021-6 6, 1129 (1997).
24. H. Feldermann, M. Sebastian, R. Merk, M. Restle, C. Ronning, and H. Hofsäss, in Hard Coatings Based on Borides, Carbides and Nitrides, edited by, A. Kumar,,, Y. W. Chung,,, R. W. J. Chia,, Proceedings of the TMS (1998) (unpublished) pp. 143-152.
25. W. Orellana and H. Chacham, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.63.125205 63, 125205 (2001).