Selective stiction based vertical comb actuators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 403-406

  Kim, Jongbaeg ^a   Christensen, Dane ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL SPRINGS; SELECTIVE STICTION; SELF-ALIGNED COMB-SETS; VERTICAL COMB ACTUATORS;

CAPACITORS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MIRRORS; OPTICAL SWITCHES; Q FACTOR MEASUREMENT; SCANNING; SILICON; SINGLE CRYSTALS; SPRINGS (COMPONENTS); STICTION;

MICROACTUATORS;

EID: 26844557012     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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