Fabrication and characterization of Pb(Zr,Ti)O3 microcantilever for resonance sensors

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 3, 2003, Pages 1475-1478

  Kim, Sang Jin ^a   Hong, Kyung Il ^a   Choi, Duck Kyun ^a  

^a Hanyang University   (South Korea)

Author keywords

Cantilever; Microsensor; PZT; Resonance frequency; RuO2

Indexed keywords

ANISOTROPY; CONDUCTIVE FILMS; ETCHING; FABRICATION; HYSTERESIS; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; RESONANCE;

RESONANCE FREQUENCY;

SENSORS;

EID: 0038290538     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.1475     Document Type: Article

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