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Thin Solid Films

Volumn 503, Issue 1-2, 2006, Pages 207-211

Underlayer effects on texture evolution in copper films

(3) Murray, C E a Rodbell, K P a Vereecken, P M a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

Copper; Surface morphology; Synthesis and characterization; Texture; X ray diffraction

Indexed keywords

ANNEALING; COPPER; MICROSTRUCTURE; RECRYSTALLIZATION (METALLURGY); SURFACE ROUGHNESS; SURFACES; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COPPER FILMS; DEPOSITION SURFACE; PLATING THICKNESSES; SYNTHESIS AND CHARACTERIZATION;

METALLIC FILMS;

EID: 33644782655 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.11.105 Document Type: Article

Times cited : (8)

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