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Journal of Materials Chemistry

Volumn 16, Issue 4, 2006, Pages 334-344

The control of thin film deposition and recent developments in oxide film growth

(1) Barber, Zoe H a

a UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FILM DEPOSITION; FILM STRUCTURE; NON-VACUUM-BASED METHODS; STRUCTURE ZONE MODELS;

FILM GROWTH; MATHEMATICAL MODELS; MONITORING; OXIDES; THIN FILMS; VACUUM;

DEPOSITION;

EID: 33644681989 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/b506228d Document Type: Article

Times cited : (29)

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