Roles of microcrystalline silicon p layer as seed, window, and doping layers for microcrystalline silicon p-i-n solar cells

Journal of Applied Physics

Volumn 99, Issue 4, 2006, Pages

  Fujibayashi, Takashi ^a   Kondo, Michio ^a,b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CRYSTALLINE MATERIALS; PHOTOVOLTAIC EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SOLAR CELLS;

CRYSTALLINE SILICON; MICROCRYSTALLINE SILICON;

SILICON;

EID: 33644609217     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2173042     Document Type: Article

References (30)

1. J. Meier et al., Sol. Energy Mater. Sol. Cells 49, 35 (1997).
2. Y. Tawada, H. Yamagishi, and K. Yamamoto, Sol. Energy Mater. Sol. Cells 78, 647 (2003).
3. A. Shah, P. Torres, R. Tscharner, N. Wyrsch, and H. Keppner, Science 285, 692 (1999).
4. A. V. Shah, J. Meier, E. Vallat-Sauvain, N. Wyrsch, U. Kroll, C. Droz, and U. Graf, Sol. Energy Mater. Sol. Cells 78, 469 (2003).
5. D. Han, G. Yue, J. D. Lorentzen, J. Lin, H. Habuchi, and Q. Wang, J. Appl. Phys. 87, 1882 (2000).
6. O. Vetterl et al., Sol. Energy Mater. Sol. Cells 62, 97 (2000).
7. T. Merdzhanova, R. Carius, S. Klein, F. Finger, and D. Dimova-Malinovska, Thin Solid Films 451-452, 285 (2004).
8. J. Meier et al., Sol. Energy Mater. Sol. Cells 66, 73 (2001).
9. Y. Mai, S. Klein, X. Geng, and F. Finger, Appl. Phys. Lett. 85, 2839 (2004).
10. J. Bailat, E. Vallat-Sauvain, L. Feitknecht, C. Droz, and A. Shah, J. Appl. Phys. 93, 5727 (2003).
11. P. D. Veneri, L. V. Mercaldo, C. Minarini, and C. Privato, Thin Solid Films 451-452, 269 (2004).
12. L. L. Smith, E. Srinivasan, and G. N. Parsons, J. Appl. Phys. 82, 6041 (1997).
13. P. Roca i Cabarrocas, N. Layadi, T. Heitz, B. Drevillon, and I. Solomon, Appl. Phys. Lett. 66, 3609 (1995).
14. M. Fang and B. Drevillon, J. Appl. Phys. 71, 5445 (1992).
15. M. Kondo, Y. Toyoshima, A. Matsuda, and K. Ikuta, J. Appl. Phys. 80, 6061 (1996).
16. B. Drevillon, C. Godet, and S. Kumar, Appl. Phys. Lett. 50, 1651 (1987).
17. M. Fang and B. Drevillon, J. Appl. Phys. 70, 4894 (1991).
18. R. W. Collins, Appl. Phys. Lett. 48, 843 (1986).
19. J. Koh, A. S. Ferlauto, P. I. Rovira, C. R. Wronski, and R. W. Collins, Appl. Phys. Lett. 75, 2286 (1999).
20. A. S. Ferlauto, R. J. Koval, C. R. Wronski, and R. W. Collins, Appl. Phys. Lett. 80, 2666 (2002).
21. H. Fujiwara, M. Kondo, and A. Matsuda, Phys. Rev. B 63, 115306 (2001).
22. H. Fujiwara, M. Kondo, and A. Matsuda, J. Appl. Phys. 93, 2400 (2003).
23. T. E. Gallon, Surf. Sci. 17, 486 (1969).
24. M. P. Seah, Surf. Sci. 32, 703 (1972).
25. Y. Nasuno, M. Kondo, A. Matsuda, H. Fukuhori, and Y. Kanemitsu, Appl. Phys. Lett. 81, 3155 (2002).
26. S. Tanuma, C. J. Powell, and D. R. Penn, J. Vac. Sci. Technol. A 8, 2213 (1990).
27. N. Layadi, P. Roca i Cabarrocas, B. Drevillon, and I. Solomon, Phys. Rev. B 52, 5136 (1995).
28. E. Vallat-Sauvain, U. Kroll, J. Meier, A. Shah, and J. Pohl, J. Appl. Phys. 87, 3137 (2000).
29. J. Zhou, K. Ikuta, T. Yasuda, T. Umeda, S. Yamasaki, and K. Tanaka, Appl. Phys. Lett. 71, 1534 (1997).
30. H. Fujiwara, M. Kondo, and A. Matsuda, Jpn. J. Appl. Phys., Part 1 41, 2821 (2002).