VHF PECVD microcrystalline silicon: From material to solar cells

Thin Solid Films

Volumn 451-452, Issue , 2004, Pages 269-273

  Veneri, P Delli ^a   Mercaldo, L V ^a   Minarini, C ^a   Privato, C ^a  

^a ENEA   (Italy)

Author keywords

Microcrystalline silicon; Solar cells; Thin film silicon; VHF PECVD

Indexed keywords

ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILANES; SOLAR CELLS; SPECTROPHOTOMETERS; THERMAL EFFECTS; THIN FILMS; ULTRAVIOLET RADIATION; VACUUM; X RAY DIFFRACTION ANALYSIS;

MICROCRYSTALLINE SILICON; THIN FILM SILICON; VHF PECVD;

SILICON;

EID: 1442360281     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.021     Document Type: Conference Paper

References (8)

1. Kroll U., Meier J., Torres P., Pohl J., Shah A. J. Non-Cryst. Solids. 227-230:1998;68.
2. Shah A., Meier J., Vallat-Sauvain E., Droz C., Kroll U., Wyrsch N., Guillet J., Graf U. Thin Solid Films. 403-404:2002;179.
3. Vetterl O., Finger F., Carius R., Hapke P., Houben L., Kluth O., Lambertz A., Mück A., Rech B., Wagner H. Solar Energy Mater. Solar Cells. 62:2000;97.
4. Yamamoto K., Yoshimi M., Tawada Y., Okamoto Y., Nakajima A., Igari S. Appl. Phys. A. 69:1999;179.
5. Drevillon B. J. Non-Cryst. Solids. 114:1989;139.
6. Vallat-Sauvain E., Kroll U., Meier J., Shah A., Pohl J. J. Appl. Phys. 87:2000;3137.
7. Hamma S., Roca i Cabarrocas P. Solar Energy Mater. Solar Cells. 69:2001;217.
8. Rath J.K., Schropp R.E.I. Solar Energy Mater. Solar Cells. 53:1998;189.