Crystallization temperature dependence of electrical conductivity on SMC poly-Si

Journal of the Korean Physical Society

Volumn 42, Issue SPEC., 2003, Pages

  Kim, Kyung Ho ^a   Sohn, Woo Sung ^a   Oh, Jae Hwan ^a   Park, Seong Jin ^a   Jang, Jin ^a   Kang, Sang Hoon ^a  

^a Kyung Hee University   (South Korea)

Author keywords

Activation energy; Electrical conduction; Metal induced crystallization; Polycrystalline silicon; Silicide mediated crystallization; Solid phase crystallization

Indexed keywords

EID: 0037305228     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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