Optical attenuation by vertically bending a rib waveguide through electrostatic zipping actuation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5970 I, Issue , 2005, Pages

  Zhang, Guhong ^a   Jessop, Paul E ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Electrostatic zipping actuation; Microelectromechanical systems (MEMS) device; Photonic devices; Variable optical attenuator (VOA); Waveguide vertical bends

Indexed keywords

ACTUATORS; ELECTROSTATICS; OPTICAL WAVEGUIDES;

ELECTROSTATIC ZIPPING ACTUATION; MEMS DEVICES; PHOTONIC DEVICES; VARIABLE OPTICAL ATTENUATORS (VOA); WAVEGUIDE VERTICAL BENDS;

ATTENUATION;

EID: 33244474882     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.628655     Document Type: Conference Paper

References (18)

1. C. R. Giles, V. Aksyuk, B. Barber, R. Ruel, L. Stulz, and D. Bishop "A silicon MEMS optical switch attenuator and its use in lightwave subsystems" IEEE J. Select. Topics Quantum Electron. 5(1), 18-25 (1999)
2. C. R. Giles, V. Askyuk, R. Ruel, L. Stulz, and D. Bishop "A fiber connectorized MEMS variable optical attenuator", IEEE Photonics Technol Lett 10(9) 1262-1264 (1998).
3. C. Marxer, P. Griss, and N.F. de Rooij, "A variable optical attenuator based on silicon micromechanics", IEEE Photonics Technol Lett. 11(2), 233-235 (1999)
4. R.R.A. Syms, H. Zou, J. Stagg, D.F. Moore "MEMS variable optical attenuator with a compound latch" Microelectronic Engineering 73-74 423-428 (2004)
5. K. Isamoto, K. Kato, A. Morosawa, C. Chong, H. Fujita, and H. Toshiyoshi, "A 5-V Operated MEMS Variable Optical Attenuator by SOI Bulk Micromachining" IEEE J. Select. Topics Quantum Electron. 10(3), 570-578 (2004)
6. J. E. Ford and J. A. Walker "Dynamic spectral power equalization using micro-opto-mechanics" IEEE Photonics Technol Lett, 10 (10), 1440-1442 (1998)
7. E. Oilier "Optical MEMS devices based on moving waveguides" IEEE J. Select. Topics Quantum Electron. 8(1), 155-162, (2002)
8. F. Chollet, M. de Labachelerie, and H. Fujita, "Compact evanescent optical switch and attenuator with electromechanical actuation", IEEE J of Selected Topics in Quantum Electronics 5 52-59 (1999)
9. G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, and P. V. Lambeck "Electrostatically actuated mechanooptical waveguide on-off switch showing high extinction at a low actuation-voltage", IEEE J. Select. Topics Quantum Electron. 5(1), 60-66 (1999)
10. P. Pliska and W. Lukosz "Electrostatically actuated integrated optical nanomechanical devices" Integrated Optics and Microstructures, Proc. SPIE, 1793, 259-272 (1992)
11. K. Sato and M. Shikida "Electrostatic film actuator with a large vertical displacement" MEMS '92 IEEE Proc., 1992, 1-5 (1992)
12. J. R. Gilbert, S.D. Senturia, "Two-phase actuators: stable zipping device without fabrication of curved structures", Proc. Solid-State Sensor and Actuator Workshop, 1996, 98-100 (1996)
13. E. S. Hung, S.D. Senturia "Tunable capacitors with programmable capacitance-voltage characteristic" Proc. Solid-State Sensor and Actuator Workshop, 1998, 292-295 (1998)
14. S. P. Pogossian, L. Vescan, and A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section" IEEE J. Lightwave Technol, 16, 1851-1853 (1998)
15. E. S. Hung and S. D. Senturia "Extending the travel range of analog-tuned electrostatic actuators", J. Microelectromechanical Systems, 8(4), 497-502 (1999)
16. E. K. Chan and R. W. Dutton "Electrostatic micromechanical actuator with extended range of travel" J. Microelectromechanical Systems, 9(3), 321-328 (2000)
17. R. Nadal-Guardia, A. Dehe, R. Aigner, and L. M. Castaner "Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point" J. Microelectromechanical Systems, 11(3), 255-263 (2002)
18. R. Legtenberg, J. Gilbert, S. D. Senturia, "Electrostatic curved electrode actuators" J. Microelectromechanical Systems, 6(3), 257-265 (1997)