MEMS variable optical attenuator with a compound latch

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 423-428

  Syms, R R A ^a   Zou, H ^a   Stagg, J ^a   Moore, D F ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

MEMS; MOEMS; Variable optical attenuator; VOA

Indexed keywords

ACTUATORS; ELECTRIC ATTENUATORS; ELECTROMAGNETISM; ETCHING; FABRICATION; FIBERS; FLIP FLOP CIRCUITS; MATHEMATICAL MODELS;

DEEP REACTIVE ION ETCHING (DRIE); VARIABLE OPTICAL ATTENUATORS; VOA;

MICROELECTROMECHANICAL DEVICES;

EID: 2542501056     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00180-7     Document Type: Conference Paper

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