Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 60-66

  Veldhuis, G J ^a   Nauta, T ^a   Gui, C ^a   Berenschot, J W ^a   Lambeck, P V ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Chemical mechanical polishing; Integrated optic nanomcchanical effect; Integrated optics; Microelectromechanical devices; Micromechanooptical devices; Optical modulators; Wafer bonding; Waveguide attenuators

Indexed keywords

ACTUATORS; BONDING; CHEMICAL POLISHING; ELECTROSTATIC DEVICES; INTEGRATED OPTOELECTRONICS; LIGHT ABSORPTION; LIGHT EXTINCTION; LIGHT MODULATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL WAVEGUIDES; SILICON WAFERS; WAVEGUIDE ATTENUATORS;

CHEMICAL MECHANICAL POLISHING (CMP); INTEGRATED NANOMECHANICAL EFFECT;

OPTICAL SWITCHES;

EID: 0032678731     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748106     Document Type: Article

References (19)

1. R. M. Boysel, T. G. McDonald, G. A. Magel, G. C. Smith, and J. L. Leonard, "Integration of deformable mirror devices with optical fibers and waveguides," Proc. SPIE, vol. 1793, pp. 34-39, 1992.
2. W. Lukosz, "Integrated optical nanomechanical devices as modulators, switches, and tunable wavelength filters, and as acoustical sensors," Proc. SPIE, vol. 1793, pp. 214-234, 1992.
3. R. Dangel and W. Lukosz, "Electro-nanomechanically actuated integrated-optical interferometric switches," in Opt. Soc. Amer. Tech. Dig. Ser., 1997, vol. 10, pp. 170-174.
4. W. Gabathuler and W. Lukosz, "Electro-nanomechanically wavelengthtunable integrated-optical Bragg-reflectors - Part II: Stable device operation," Opt. Commun., vol. 145, pp. 258-264, 1998.
5. G. A. Magel, "Integrated optic devices using micromachined metal membranes," Proc. SPIE, vol. 2686, pp. 54-63, 1996.
6. P. Pliska and W. Lukosz, "Integrated optical acoustical sensors," Sens. Actuators A, vol. 41-42, pp. 93-97, 1994.
7. C. Gui, G. J. Veldhuis, T. M. Koster, P. V. Lambeck, J. W. Berenschot, J. G. E. Gardeniers, and M. Elwenspoek, "Nanomechanical optical devices fabricated with aligned wafer bonding," in Proc. 11th Annu. Int. Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany, Jan. 25-29, 1998, pp. 482-487.
8. G. J. Veldhuis, C. Gui, T. Nauta, T. M. Koster, P. V. Lambeck, J. W. Berenschot, J. G. E. Gardeniers, and M. Elwenspoek, "Mechano-optical waveguide on/off intensity switch," Opt. Lett., vol. 23, pp. 1532-1534, 1998, to be published.
9. G. J. Veldhuis and P. V. Lambeck, "Highly-sensitive passive integrated optical spiral-shaped waveguide refractometer," Appl. Phys. Lett., vol. 71, pp. 2895-2897, 1997.
10. G. J. Veldhuis, J. H. Berends, R. G. Heideman, and P. V. Lambeck, "An integrated optical Bragg-reflector used as chemo-optical sensor," Pure Appl. Opt., vol. 7, pp. L23-L26, 1998.
11. Ch. Stamm and W. Lukosz, "Dual-wavelengths integrated optical difference interferometer as refractometer and biosensor," in Proc. 8th Eur. Conf. Integrated Optics (ECIO'97), Stockholm, Sweden, 1997, pp. 98-101.
12. K. Worhoff, P. V. Lambeck, H. Albers, N. F. van Hulst, O. F. J. Noordman, and Th. J. A. Popma, "Optimization of LPCVD silicon oxynitride to large refractive index homogeneity and layer thickness uniformity," Proc. SPIE, vol. 3099, pp. 257-268, 1997.
13. O. Parriaux and G. J. Veldhuis, "Normalized analysis for the sensitivity optimization of integrated optical evanescent wave sensors," J. Lightwave Technol., vol. 16, pp. 573-582, 1998.
14. H. A. C. Tilmans and R. Legtenberg, "Electrostatically driven vacuum-encapsulated polysilicon resonators - Part II. Theory and performance," Sens. Actuators A, vol. 45, pp. 67-84, 1994.
15. Handbook of Chemistry and Physics, 78th ed., D. R. Lide, Ed. Boca Raton, FL: CRC, 1997.
16. H. A. C. Tilmans, M. Elwenspoek, and J. H. J. Fluitman, "Micro resonant force gauges," Sens. Actuators A, vol. 30, pp. 35-52, 1992.
17. H. Hosaka, K. Itao, and S. Kuroda, "Damping characteristics of beam-shaped micro-oscillators," Sens. Actuators A, vol. 49, pp. 87-95, 1995.
18. R. Legtenberg, H. Tilmans, J. Elders, and M. Elwenspoek, "Stiction of surface micromachined structures after rinsing and drying: Model and investigation of adhesion mechanisms," Sens. Actuators A, vol. 43, pp. 230-238, 1994.
19. C. Gui, H. Albers, J. G. E. Gardeniers, M. Elwenspoek, and P. V. Lambeck, "Fusion bonding of rough surface with polishing technique for silicon micro machining," Res. J. Microsyst. Technol., vol. 3, pp. 122-128, 1997.