High-speed scanning of piezo- probes for nano-fabrication

Journal of Manufacturing Science and Engineering, Transactions of the ASME

Volumn 120, Issue 3, 1998, Pages 617-622

  Croft, D ^a   McAllister, D ^a   Devasia, S ^a  

^a UNIVERSITY OF UTAH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK CONTROL; PIEZOELECTRIC DEVICES; PROBES; SCANNING TUNNELING MICROSCOPY; VIBRATIONS (MECHANICAL);

HIGH-SPEED SCANNING; PIEZO-PROBES;

NANOTECHNOLOGY;

EID: 0032138874     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.2830166     Document Type: Article

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