Laser-induced damage of polycrystalline silicon optically powered MEMS actuators

Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005

Volumn PART A, Issue , 2005, Pages 761-766

  Serrano, Justin R ^a   Phinney, Leslie M ^a   Brooks, Carlton F ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISSIPATION; LASERS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; POLYSILICON;

LASER POWERS; LASER-INDUCED DAMAGE;

ACTUATORS;

EID: 32844461214     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/ipack2005-73322     Document Type: Conference Paper

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