Micro impact drive mechanisms using optically excited thermal expansion

Journal of Microelectromechanical Systems

Volumn 6, Issue 3, 1997, Pages 200-207

  Ohmichi, Osamu ^b,c,f   Yamagata, Yutaka ^a,b,d,e,g   Higuchi, Toshiro ^b,e,h,i  

^a IEEE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c EAST JAPAN RAILWAY COMPANY   (Japan)

^d INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^e KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^f Japan Society of Precision Engineering   (Japan)

^g Japan Robotics Society   (Japan)

^h INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

ⁱ Japan Society for Precision Engineering   (Japan)

Author keywords

Microactuator; Microfabrication; Optical excitation; Thermal expansion; Ultrahigh precision machining

Indexed keywords

ACTUATORS; ALUMINUM ALLOYS; CUTTING; ETCHING; FABRICATION; FRICTION; MICROMACHINING; MICROMETERS; NUMERICAL METHODS; PHOTOLITHOGRAPHY; THERMAL EXPANSION;

MICROACTUATOR; OPTICAL EXCITATION; PRECISION CUTTING TECHNIQUES; ULTRAHIGH PRECISION MACHINING;

MECHANISMS;

EID: 0031232507     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623108     Document Type: Article

References (8)

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