Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications

Applied Optics

Volumn 41, Issue 12, 2002, Pages 2361-2367

  Gauthier, Robert C ^a   Tait, R Niall ^a   Ubriaco, Mike ^a,b  

^a CARLETON UNIVERSITY   (Canada)

^b LAURENTIAN UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTROMAGNETIC WAVE REFLECTION; MICROMACHINING; MICROSTRUCTURE; PHOTONS; POLYSILICON;

MICRO-OPTICAL-ELECTRO-MECHANICAL SYSTEMS (MEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0037139962     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.002361     Document Type: Article

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