Damage of MEMS thermal actuators heated by laser irradiation

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5716, Issue , 2005, Pages 81-88

  Phinney, Leslie M ^a   Klody, Kelly A ^a   Sackos, John T ^a   Walraven, Jeremy A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Laser damage of MEMS; MEMS thermal actuators; Optical actuation

Indexed keywords

LASER DAMAGE OF MEMS; LASER HEATING; MEMS THERMAL ACTUATORS; OPTICAL ACTUATION;

ACIDITY; ACTUATORS; DEPOSITION; ETCHING; FAILURE ANALYSIS; LASER BEAM EFFECTS; MICROMACHINING; POLYSILICON; SOLUTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 21844474033     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.594408     Document Type: Conference Paper

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