Novel Microactuators based on a Photo-Thermo-Mechanical Actuation Strategy

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 192-197

  Baglio, S ^a   Castorina, S ^a   Fortuna, L ^a   Savalli, N ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

Micro lenses; Photo Thermo Mechanical Micro Actuators

Indexed keywords

ANISOTROPY; CANTILEVER BEAMS; ENERGY UTILIZATION; ETCHING; LASER BEAMS; MICROLENSES; MICROWAVES; THERMAL EXPANSION; THERMOMECHANICAL TREATMENT;

ACTUATION ENERGY; PHOTO-THERMO-MECHANICAL MICROACTUATORS;

MICROACTUATORS;

EID: 0038467190     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Shibata T., et al., Microwave Energy Supply System for In-pipe Micromachine, MHS '98: Proc. of the Int. Symp. on Micromechatronics and Human Science: Nagoya Congress Centre November 25 - 28, 1998.
2. Akita S., Micromachine technology development and its applications" MHS '98: Proc. of the Int. Symp. on Micromechatronics and Human Science: Nagoya Congress Centre November 25 - 28, 1998.
3. Mayashi I., et al., Micro moving robotics, MHS '98: Proc. of the Int. Symp. on Micromechatronics and Human Science: Nagoya Congress Centre November 25-28, 1998.
4. Sankur H., et al. Fabrication of refractive microlens array, Proc. of the SPIE Vol. 2383: Micro-Optics/Micromechanics and Laser Scanning and Shaping, Ed. M. E. Motamedi, L. Heiser, 7-9 Feb. 1995 San Jose, California.
5. Erdmann L., et al., Technique for monolithic fabrication of silicon microlenses with selectable rim angles, Optical Engineering 36 (4) 1094-1098 (Apr. 1997)
6. Uchino K., et al., Photostrictive actuators, Mechatronics 10 (2000) 467-487.
7. Ugural A. C., et al. Advanced Strength and Applied Elasticity 3rd Ed., Prentice Hall PTR, New Jersey, 1995
8. th Ed., John Wiley & Sons, NY.