Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5921, Issue , 2005, Pages 1-12

  Assoufid, Lahsen ^a   Rommeveaux, Amparo ^b   Ohashi, Haruhiko ^c   Yamauchi, Kazuto ^d   Mimura, Hidekazu ^d   Qian, Jun ^a   Hignette, Olivier ^b   Ishikawa, Tetsuya ^c,e   Morawe, Christian ^b   Macrander, Albert ^a   Khounsary, Ali ^a   Goto, Shunji ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^d OSAKA UNIVERSITY   (Japan)

^e RIKEN   (Japan)

Author keywords

Long trace profiler; Round robin; Surface metrology; Synchrotron radiation; X ray mirrors

Indexed keywords

ERROR ANALYSIS; OPTICAL VARIABLES MEASUREMENT; PHOTONS; SYNCHROTRON RADIATION;

ADVANCED PHOTON SOURCE (APS); LONG TRACE PROFILER; ROUND ROBIN;

X RAY OPTICS;

EID: 31844433622     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.623209     Document Type: Conference Paper

References (16)

1. P.Z. Takacs, S.N. Qian, and J. Colbert, "Design of a long trace surface profiler," Proc. SPIE 749 (1987) pp. 59-64.
2. P.Z. Takacs, S.N. Qian, Surface Profile Interferometer U.S. Patent No. 4,884,697 (1989).
3. S. Irick, "Long trace profiler survey," Proc. SPIE 3782 (1999) pp. 275-282.
4. Amparo Rommeveaux, Muriel Thomasset, Daniele Cocco, Frank Siewert, "First report on European round robin for slope measuring profilers," (These proceedings).
5. A. Khounsary, Argonne National Laboratory (Private communication).
6. Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi. Kenji Tamasaku, Tetsuya Ishikawa, and Yuzo Mon, Jpn. J. Appl. Phys. 42 (2003) pp. 7129-7134.
7. Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Kazumasa Ueno, Katsuyoshi Endo, Alexi Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, and Yuzo Mori, Rev. Sci. Instrum. 74 (2003) pp. 2894-2898.
8. K. Von Bieren, "Pencil beam interferometer for aspherical optical surfaces laser diagnostics," Proc. SPIE 343 (1982).
9. Continental Optical Corp. 15 Power Drive, Hauppauge, NY 11788, USA. (Acquired by Ocean Optics, 830 Douglas Ave. Dunedin, FL 34698, USA).
10. Peter Z. Takacs, Eugene L. Church, Cynthia Bresloff, and Lahsen Assoufid, "Long Trace Profiler Measurement Repeatability Improvements," Appl. Optics 38 (1999), pp. 5468-5479.
11. Jean Susini, Robert Baker, Amparo Vivo, Optical Metrology Facility at the ESRF, Rev. of Sci. Instrum. 66 (1995) pp. 2232-2234.
12. Olivier Hignette, Amparo Rommeveaux, Status of the optical metrology at the ESRF, Proc. SPIE 2856 (1996) pp. 314-322.
13. S. Qian, W. Jark and P.Z. Takacs, Rev. Sci. Instrum. 66 (1995) pp. 2562-2569.
14. S. Irick,"Error reduction techniques for measuring long synchrotron mirrors," Proc. SPIE 3447 (1998) p 101.
15. E.L. Church and P.Z. Takacs, "BASIC Program for Power Spectrum Estimation," BNL report #49035 rev. 5/94.
16. Shinan Qian, Giovani Sostero, and Peter Z. Takacs,"Precision calibration and systematic error reduction in the long trace profiler," Optical Eng. 39 (2000) pp. 304-310.