Crystallization behavior and domain structure in textured Pb(Zr 0.52Ti0.48)O3 thin films by different annealing processes

Thin Solid Films

Volumn 500, Issue 1-2, 2006, Pages 138-143

  Huang, W ^a   Jiang, S W ^a   Li, Y R ^a   Zhu, J ^a   Zhang, Y ^a   Wei, X H ^a   Zeng, H Z ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Crystallization; Domain structure; Film orientation; Lead zirconate titanate; Rapid thermal annealing

Indexed keywords

FERROELECTRICITY; INTERFACIAL ENERGY; LEAD COMPOUNDS; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; TEMPERATURE DISTRIBUTION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DOMAIN STRUCTURES; FILM ORIENTATION; LEAD ZIRCONATE TITANATE;

CRYSTALLIZATION;

EID: 31644440108     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.11.062     Document Type: Article

References (22)

1. H.D. Chen, K.R. Udayakumar, C.J. Gaskey, and L.E. Cross Appl. Phys. Lett. 67 1995 3411
2. O. Auciello, J.F. Scott, and R. Ramesh Phys. Today 51 1998 22
3. A. Lin, X. Hong, V. Wood, A.A. Verevkin, C.H. Ahn, R.A. McKee, F.J. Walker, and E.D. Specht Appl. Phys. Lett. 78 2001 2034
4. G.D. Hu, I.H. Wilson, J.B. Xu, C.P. Li, and S.P. Wong Appl. Phys. Lett. 76 2000 1758
5. Y. Wang, C. Ganpule, B.T. Liu, H. Li, K. Mori, B. Hill, M. Wuttig, and R. Ramesh Appl. Phys. Lett. 80 2002 97
6. W. Wu, and Y. Wang Appl. Phys. Lett. 85 2004 1583
7. W. Gong, J.F. Li, X.C. Chu, Z.L. Gui, and L.T. Li J. Appl. Phys. 96 2005 590
8. X.G. Tang, J. Wang, H.L.W. Chan, and A.L. Ding J. Cryst. Growth 267 2004 117
9. K. Aoki, Y. Fukuda, and A. Nishimura Jpn. J. Appl. Phys. 34 1995 192
10. T.L. Ren, L.T. Zhang, L.T. Liu, and Z.J. Li Ferroelectrics 259 2001 311
11. J. Yu, X.J. Meng, J.L. Sun, Z.M. Huang, and J.H. Chu J. Appl. Phys. 96 2004 2792
12. P. Muralt, T. Maeder, L. Sagalowicz, and S. Hiboux J. Appl. Phys. 83 1998 3835
13. K. Aoki, Y. Fukuda, K. Numata, and A. Nishimura Jpn. J. Appl. Phys. 33 1994 5155
14. S.Y. Chen, and C.L. Sun J. Appl. Phys. 90 2001 2970
15. A. Gruverman, and A. Kholkin Appl. Phys. Lett. 78 2001 2751
16. Z. Huang, Q. Zhang, and R.W. Whatmore J. Appl. Phys. 86 1999 1662
17. J.H. Kim, A.T. Chien, and F.F. Lange J. Mater. Res. 14 1999 1190
18. J.S. Cross, M. Fujiki, M. Tsukada, J. Kotaka, and J. Goto J. Mater. Res. 14 1999 4366
19. I. Kanno, H. Kotera, K. Wasa, T. Matsunaga, T. Kamada, and R. Takayama J. Appl. Phys. 93 2003 4091
20. M. Es-Souni, M. Abed, and A. Piorra Thin Solid Films 94 2001 229
21. B.J. Rodriguez, A. Gruverman, A.I. Kingon, R.J. Nemanich, and J.S. Cross J. Appl. Phys. 95 2004 1958
22. D.V. Taylor, and D. Damjanovic Appl. Phys. Lett. 76 2000 1615