Physical and chemical properties of sputter-deposited TaCxN y films

Journal of Physics Condensed Matter

Volumn 18, Issue 6, 2006, Pages 1977-1986

  Aouadi, S M ^a   Zhang, Y ^a   Basnyat, P ^a   Stadler, S ^a   Filip, P ^b   Williams, M ^c   Hilfiker, J N ^d   Singh, N ^d   Woollam, J A ^d  

^a SOUTHERN ILLINOIS UNIVERSITY   (United States)

^b Southern Illinois University Carbondale   (United States)

^c University of Illinois at Urbana Champaign   (United States)

^d J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LATTICE CONSTANTS; MAGNETRON SPUTTERING; STOICHIOMETRY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DENSITY FUNCTIONAL THEORY (DFT); DENSITY OF STATES; INTERBAND TRANSITIONS;

TANTALUM COMPOUNDS;

EID: 31544455866     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/6/013     Document Type: Article

References (27)

1. Amriou T, Bouhafs A, Aourag H, Khelifa B, Bresson S and Mathieu C 2003 Physica B 325 46
2. Holleck H 1990 Surf. Coat. Technol. 43/44 245
3. Sproul W D 1986 Thin Solid Films 107 141
4. Martinez-Martinez D, Sanchez-Lopez J C, Rojas T C, Fernamdez A, Eaton P and Belin M 2005 Thin Solid Films 472 64
5. Mani A, Aubert P, Khodja H and Houdy P 2003 Mater. Res. Soc. Symp. 778 201
6. Donnelly N, McConnell M, Dowling D P and O'Mahony J D 2000 Mater. Sci. Forum 325/326 141
7. Almer J, Odén M and Håkansson G 2001 Thin Solid Films 385 190
8. Čekada M, Maček M, Merl D K and Panjan P 2003 Thin Solid Films 433 174
9. Eerden M, Van Ijzendoom W, Tietema R and Van der Kolk G J 2003 Annual Technical Conf. Proc. Society of Vacuum Coaters p 56
10. Wang S J, Tsai H Y, Sun S C and Shiao M H 2001 J. Electron. Mater. 30 917
11. Sahnoun M, Daul C, Driz M, Parlebas J C and Demangeat C 1998 Comput. Mater. Sci. 33 175
12. Frisk K 1998 J. Alloys Compounds 278 216
13. Dreizler R M and Gross E K U 1990 Density Functional Theory (Berlin: Springer)
14. Milman V, Winkler V, White J A, Pickard C J, Payne M C, Akhmatskaya E V and Nobes R H 2000 Int. Quantum Chem. 77 895
15. Payne M C, Teter M P, Allan D C, Arias T A and Joannopoulos J D 1992 Rev. Mod. Phys. 64 1045
16. Segall M D, Lindan P J D, Probert M J, Pickard C J, Hasnip P J, Clark S J and Payne M C 2002 J. Phys.: Condens. Matter 14 2717
17. Wang Y and Perdew J P 1991 Phys. Rev. B 43 8911
18. Aouadi S M, Debessai M and Filip P 2004 J. Vac. Sci. Technol. B 22 1134
19. Khan M, Dubenko I, Stadler S and Ali N 2005 J. Appl. Phys. 97 10M304
20. Aouadi S M, Bohnhoff A, Amriou T, Haasch R T, Williams M and Hilfiker J N 2005 J. Vac. Sci. Technol. A 23 705
21. Hilfiker J N 2005 Handbook of Ellipsometry ed H G Tompkins and E A Irene (New York: William Andrew Publishing) chapter 12
22. Mattessini M and Matar S F 2002 Phys. Rev. B 65 075110
23. Petrov I, Barna P B, Hultman L and Greene G E 2003 J. Vac. Sci. Technol. A 21 S117
24. Stuber M, Leiste H, Ulrich S, Holleck H and Schild D 2002 Surf. Coat. Technol. 150 218
25. Aouadi S M and Debessai M 2004 J. Vac. Sci. Technol. A 22 1975
26. Dayan M, Shengli M and Xu K 2005 Surf. Coat. Technol. 200 382
27. Patsalas P and Logothetidis S 2001 J. Appl. Phys. 90 4725