SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 382-386

Superhard nanocomposite Ti-Si-C-N coatings prepared by pulsed-d.c plasma enhanced CVD

(3) Ma, Dayan a Ma, Shengli a Xu, Kewei a

a XI'AN JIAOTONG UNIVERSITY (China)

Author keywords

Hardness; Nanocomposite; PECVD; Ti Si C N coatings

Indexed keywords

COMPOSITION; HARDNESS; MICROSTRUCTURE; MIXING; MIXTURES; NANOSTRUCTURED MATERIALS; OXIDATION RESISTANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MIXING RATIO; NANOCOMPOSITE MICROSTRUCTURE; SUPERHARD NANOCOMPOSITE COATINGS;

INORGANIC COATINGS;

COATING;

EID: 24644473584 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.128 Document Type: Article

Times cited : (31)

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