Electronic and optical properties of Ta 1-xZr xN films: Experimental and ab initio studies

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 705-712

  Aouadi, S M ^a   Bohnhoff, A ^a   Amriou, T ^b   Haasch, R T ^c   Williams, M ^c   Hilfiker, J N ^d  

^a SOUTHERN ILLINOIS UNIVERSITY   (United States)

^b UNIVERSITÉ D'ARTOIS   (France)

^c University of Illinois at Urbana Champaign   (United States)

^d J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EXCITATIONS; ROCKSALT STRUCTURE; SPECTROSCOPIC ELLIPSOMETRY (SE); VALENCE BANDS;

ELECTRONIC STRUCTURE; MAGNETRON SPUTTERING; PHOTOELECTRON SPECTROSCOPY; PROBABILITY DENSITY FUNCTION; SOLID SOLUTIONS; X RAY DIFFRACTION ANALYSIS;

TANTALUM COMPOUNDS;

EID: 31044437281     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1946710     Document Type: Article

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