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Volumn 472, Issue 1-2, 2005, Pages 64-70
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Structural and microtribological studies of Ti-C-N based nanocomposite coatings prepared by reactive sputtering
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Author keywords
Atomic force microscopy (AFM); Electron energy loss spectroscopy (EELS); Titanium carbide; Tribology
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COMPOSITION;
CUTTING TOOLS;
ELECTRON DIFFRACTION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
MICROSTRUCTURE;
NANOSTRUCTURED MATERIALS;
PROTECTIVE COATINGS;
SPUTTERING;
TITANIUM CARBIDE;
TITANIUM NITRIDE;
TRIBOLOGY;
X RAY DIFFRACTION ANALYSIS;
GRANULAR MICROSTRUCTURE;
LIFETIME;
REACTIVE SPUTTERING;
THIN FILMS;
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EID: 9944242259
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2004.06.140 Document Type: Article |
Times cited : (57)
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References (22)
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