Microreactor and electrochemical detectors fabricated using Si and EPON SU-8

Sensors and Actuators, B: Chemical

Volumn 64, Issue 1-3, 2000, Pages 156-162

  L'Hostis, E ^a,b   Michel, Ph E ^a,c   Fiaccabrino, G C ^a,d   Strike, D J ^a   De Rooij, N F ^a   Koudelka Hep, M ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b IMT (Samlab)   (Switzerland)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^d Swiss Center for Electronics   (Switzerland)

Author keywords

Enzymatic microreactor; Epon SU 8; Flow injection analysis; Miniaturised electroluminescence detector; Silicon sensors

Indexed keywords

EID: 0000351682     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00500-6     Document Type: Article

References (21)

1. T. Laurell, J. Drott, L. Rosengren, Silicon wafer integrated enzyme reactors, Biosens. Bioelectron. 10 (1995) 289-299.
2. P. Arquint, M. Koudelka-Hep, B.H. Van der Schoot, P. Van der Wal, N.F. de Rooij, Micromachined analysers on a silicon chip, Clin. Chem. 40 (1994) 1805-1809.
3. H. Bart, B.H. Van der Schoot, S. Jeanneret, A. Van der Berg, N.F. de Rooij, A modular miniaturized chemical analysis system, Sens. Actuators, B 13-14 (1993) 333-335.
4. K.Y. Lee, N. LaBianca, S.A. Riston, S. Zolgharnain, J.D. Gelorme, J. Shaw, T.H.P. Chang, Micromachining applications of a high resolution ultrathick photoresist, J. Vac. Sci. Technol., B 13 (1995) 3012-3016.
5. H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, P. Vettiger, Epon SU-8: a low-cost negative resist for MEMS, in: Proc. MME '96, Barcelona, Spain, October 21-22, 1996, pp. 32-35.
6. W.-Y. Lee, Tris(2,2(-bipyridyl)ruthenium (II) electrogenerated chemiluminescence in analytical science, Mikrochim. Acta 127 (1997) 19-39.
7. A.W. Knight, G.M. Greenway, Occurrence, mechanisms and analytical applications of electrogenerated chemiluminescence - a review, Analyst 119 (1994) 879-890.
8. R.D. Gerardi, N.W. Barnett, S.W. Lewis, Analytical applications of tris(2,2(-bipyridyl)ruthenium (III) as a chemiluminescent reagent, Anal. Chim. Acta 378 (1999) 1-41.
9. K.E. Haapakka, J.J. Kankare, Apparatus for mechanic and analytical studies of the electrogenerated chemiluminescence of luminol, Anal. Chim. Acta 138 (1982) 253-262.
10. M.E. Fernández Laespada, J.L. Perez Pavón, B. Moreno Cordero, Electroluminescent detection of enzymatically generated hydrogen peroxyde, Anal. Chim. Acta 327 (1996) 253-260.
11. J. Kremeskötter, R. Wilson, D.J. Schiffrin, B.J. Luff, J.S. Wilkinson, Detection of glucose via electroluminescence in a thin-layer cell with a planar optical waveguide, Meas. Sci. Technol. 6 (1995) 1325-1328.
12. B. Xie, B. Danielsson, P. Norberg, F. Winquist, I. Lundström, Development of a thermal microbiosensor fabricated on a silicon chip, Sens. Actuators, B 6 (1992) 127-130.
13. Y. Murakami, T. Takeuchi, K. Yokoyama, E. Tamiya, I. Karube, M. Suda, Integration of enzyme-immobilized column with electrochemical flow cell using micromachining techniques for a glucose detection system, Anal. Chem. 65 (1993) 2731-2735.
14. T. Laurell, L. Rosengren, A micromachined enzyme reactorin 〈110〉-oriented silicon, Sens. Actuators, B 18-19 (1994) 614-617.
15. T. Laurell, J. Drott, L. Rosengren, Silicon wafer integrated enzyme reactors, Biosens. Bioelectron. 10 (1995) 289-299.
16. D.J. Strike, P. Thébaud, P. Arquint, M. Koudelka-Hep, N.F. de Rooij, M.G.H. Meijerink, in: Microsystem Technology for Chemical and Biological Micro-Reactor, VCH, New York, 1996, pp. 132-137, DECHEMA monographs.
17. J.E. Vitt, D.C. Johnson, R.C. Engstrom, The effect of electrode material on the electrogenerated chemiluminescence of luminol, J. Electrochem. Soc. 138 (1991) 1637-1643.
18. G.C. Fiaccabrino, X.-M. Tang, N. Skinner, N.F. de Rooij, M. Koudelka-Hep, Interdigited microelectrode arrays based on sputtered carbon thin-films, Sens. Actuators. B 35-36 (1996) 247-2554.
19. G.C. Fiaccabrino, N.F. de Rooij, M. Koudelka-Hep, On-chip generation and detection of electrochemiluminescence, Anal. Chim. Acta 359 (1998) 263-266.
20. G.M. Greenway, A.W. Knight, P.J. Knight, Electrogenerated chemiluminescent determination of codeine and related alkaloids and pharmaceuticals with tris(2,2′-bipyridine)ruthenium(II), Analyst 120 (1995) 2549-2552.
21. K.E. Haapakka, J.J. Kankare, The mechanism of the electrogenerated chemiluminescence of luminol in aqueous alkaline solution, Anal. Chim. Acta 138 (1982) 263-275.