CMOS drivable electrostatic microactuator with large deflection

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 90-95

  Yasuda, Takashi ^a   Shimoyama, Isao ^a   Miura, Hirofumi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CMOS INTEGRATED CIRCUITS; DEFLECTION (STRUCTURES); ELECTROSTATIC DEVICES; HYSTERESIS; MICROELECTROMECHANICAL DEVICES; MOTION CONTROL; VOLTAGE CONTROL;

ELECTROSTATIC MICROACTUATORS;

ACTUATORS;

EID: 0030672631     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)