256 × 256 port optical cross-connect subsystem

Journal of Lightwave Technology

Volumn 22, Issue 6, 2004, Pages 1499-1508

  Neilson, David T ^a,b,c   Frahm, R ^c   Kolodner, Paul ^c   Bolle, C A ^c   Ryf, Roland ^a,b   Kim, J ^c   Papazian, A R ^c   Nuzman, C J ^c   Gasparyan, A ^c   Basavanhally, N R ^c   Aksyuk, V A ^c   Gates, J V ^c  

^a IEEE   (United States)

^b OSA ^*  (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER LENS; OPTICAL CROSS CONNECT SUBSYSTEM; OPTICAL FIBER SWITCHES; PHOTONIC SWITCHING SYSTEMS; SILICON MICROLENES;

COMPUTER SIMULATION; CROSSTALK; FITS AND TOLERANCES; INSERTION LOSSES; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; OPTICAL COMMUNICATION EQUIPMENT; OPTICAL DESIGN; OPTICAL INTERCONNECTS; OPTICAL SWITCHES; PHOTORESISTS;

DATA COMMUNICATION SYSTEMS;

EID: 3142706634     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2004.829223     Document Type: Article

References (39)

1. Y. Tze-Wei, K. L. E. Law, and A. Goldenberg, "MEMS optical switches," IEEE Commun. Mag., vol. 39, pp. 158-163, Nov. 2001.
2. D. J. Bishop, C. R. Giles, and G. P. Austin, "The Lucent LambdaRouter: MEMS technology of the future here today," IEEE Commun. Mag., vol. 40, pp. 75-79, Mar. 2002.
3. A. Neukermans and R. Ramaswami, "MEMS technology for optical networking applications," IEEE Commun. Mag., vol. 39, pp. 62-69, Jan. 2001.
4. E. Goldstein, L. Lin, and J. A. Walker, "Lightwave micromachines for optical networks," Optics Photonics News, Mar. 2001.
5. D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. VanBlarcum, L. Zhang, and C. R. Giles, "Fully provisioned 112 × 112 micro-mechanical optical cross connect with 35.8 Tb/s demonstrated capacity," in Proc. Optical Fiber Communication Conf. (OFC 2000), vol. 4, 2000, pp. 202-204.
6. P. M. Hagelin, U. Krishnamoorthy, J. P. Heritage, and O. Solgaard, "Scalable optical cross-connect switch using micromachined mirrors," IEEE Photon. Technol. Lett., vol. 12, pp. 882-884, July 2000.
7. A. Keating, "Optical MEMS in switching systems," in IEEE/LEOS Annual Meeting 2001 Dig., San Diego, CA, Nov. 2001, pp. 8-9.
8. R. Ryf, J. Kim, J. P. Hickey, A. Gnauck, D. Carr, F. Pardo, C. Bolle, R. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, H. R. Shea, A. Gasparyan, V. Muratov, J. E. Griffith, J. A. Prybyla, S. Goyal, C. D. White, M. T. Lin, R. Ruel, C. Nijander, S. Arney, D. T. Neilson, D. J. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, D. S. Greywall, T. C. Lee, H. T. Soh, W. M. Mansfield, S. Jin, W. Y. Lai, H. A. Huggins, D. L. Barr, R. A. Cirelli, G. R. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, N. A. Ciampa, F. P. Klemens, M. D. Morris, T. Boone, J. Q. Liu, J. M. Rosamilia, and C. R. Giles, "1296-port MEMS transparent optical crossconnect with 2.07 Petabit/s switch capacity," in Proc. Optical Fiber Communication Conf. and Exhibit, 2001 (OFC 2001), vol. 4, 2001, Paper PD28-P1-3.
9. J. Kim, J. V. Gates, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, and D. T. Neilson, "1100 × 1100-port MEMS-based optical crossconnect with 4 dB maximum loss," IEEE Photon. Technol. Lett., vol. 15, pp. 1537-1539, Nov. 2003.
10. O. Jerphagnon, R. Anderson, A. Chojitacki, R. Heikey, W. Fant, V. Kaman, A. Keating, B. Liu, C. Pusaria, J. R. Sechrist, D. Xu, S. Vuan, and Z. Xuezhe, "Performance and applications of a large port-count and low-loss photonic cross-connect system for optical networks," in 15th Annu. Meeting IEEE Lasers and Electro-Optics Society, 2002 (LEOS 2002), vol. 1, 2002, pp. 299-300.
11. J. Kim, A. R. Papazian, R. E. Frahm, and J. V. Gates, "Performance of large scale MEMS-based optical crossconnect switches," in 15th Annu. Meeting IEEE Lasers and Electro-Optics Society, 2002 (LEOS 2002), vol. 2, 2002, pp. 411-412.
12. A. Neukermans, "MEMS devices for all optical networks," in Proc. SPIE, vol. 4561, MOEMS and Miniaturized Systems II, 2001, pp. 1-10.
13. Y. Uenishi, J. Yamaguchi, T. Yamamoto, N. Takeuchi, A. Shimizu, E. Higurashi, and R. Sawada, "Free-space optical cross connect switch based on a 3D MEMS mirror array," in 15th Annu. Meeting IEEE. Lasers and Electro-Optics Society, 2002 (LEOS 2002), vol. 1, 2002, pp. 59-60.
14. V. A. Aksyuk, S. Arney, N. R. Basavanhally, D. J. Bishop, C. A. Bolle, C. C. Chang, R. Frahm, A. Gasparyan, J. V. Gates, R. George, C. R. Giles, J. Kim, P. R. Kolodner, T. M. Lee, D. T. Neilson, C. Nijander, C. J. Nuzman, M. Paczkowski, A. R. Papazian, F. Pardo, R. Ryf, H. Shea, and M. E. Simon, "238 × 238 micromechanical optical crossconnect," IEEE Photon. Technol. Lett., vol. 15, pp. 587-589, Apr. 2003.
15. M. C. Wu, D. Hah, P. R. Patterson, and H. Toshiyoshi, "Microelectromechanical scanning devices for optical networking applications," in 2002 IEEE Int. Solid-State Circuits Conf. Tech. Dig. (ISSCC 2002), vol. 1, 2002, pp. 358-359.
16. Y. Mizuno, O. Tsuboi, N. Kouma, H. Soneda, H. Okuda, Y. Nakamura, S. Ueda, I. Sawaki, and F. Yamagishi, "A 2-axis comb-driven micromirror array for 3D MEMS switches," in 2002 IEEE/LEOS Int. Conf. Optical MEMS Dig., Aug. 2002, pp. 17-18.
17. R. Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi, and Y. Uenishi, "Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch," in 2002 IEEE/LEOS Int. Conf. Optical MEMS Dig., Aug. 2002, pp. 11-12.
18. M.-H. Kiang, O. Solgaard, and K. Y. Lau, "Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning," J. Micromech. Syst., vol. 7, pp. 27-37, 1998.
19. V. A. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. B. Chan, M. E. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. T. Neilson, J. Kim, R. Giles, J. Gates, and D. Bishop, "Beam-steering micromirrors for large optical crossconnects," J. Lightwave Technol., vol. 21, pp. 634-642, Mar. 2003.
20. V. A. Aksyuk, D. J. Bishop, C. A. Bolle, R. C. Giles, and F. Pardo, "Micro-electro-mechanical optical device," U.S. Patent 6 300 619, Oct. 9, 2001.
21. R. R. A. Syms, "Scaling laws for MEMS mirror-rotation optical cross connect switches," J. Lightwave Technol., vol. 20, pp. 1084-1094, July 2002.
22. K. Bergman, N. Bonadeo, I. Brener, and K. Chiang, "Ultra-high capacity MEMS based optical cross-connects," in Proc. SPIE, vol. 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, Cannes, Frances, 2001, pp. 2-5.
23. K. Bergman, "Overview of high capacity optical cross-connects," in 14th Annu. Meeting IEEE Lasers and Electro-Optics Society, 2001 (LEOS 2001), vol. 1, Nov. 2001, pp. 224-225.
24. P. B. Chu, S. S. Lee, and S. Park, "MEMS: The path to large optical crossconnects," IEEE Commun Mag., vol. 40, pp. 80-87, Mar. 2002.
25. X. Zheng, V. Kaman, Y. Shifu, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, and J. E. Bowers, "Three-dimensional MEMS photonic cross-connect switch design and performance," IEEE J. Select. Topics Quantum Electron., vol. 9, pp. 571-578, Mar.-Apr. 2003.
26. N. R. Basavanhally, "Opto-mechanical alignment and assembly of 2D-array components," in 1993 IEEE Princeton Section Sarnoff Symp. Dig., Mar. 26, 1993, pp. 0-0.
27. G. M. Proudley, C. S. Stace, and H. White, "Fabrication of 2-dimensional fiber optic arrays for an optical crossbar switch," Opt. Eng., vol. 33, no. 2, pp. 627-635, Feb. 1994.
28. J. M. Sasian, R. A. Novotny, M. G. Beckman, S. L. Walker, M. J. Wojcik, and S. J. Hinterlong, "Fabrication of fiber bundle arrays for free-space photonic switching systems," Opt. Eng., vol. 33, no. 9, pp. 2979-2985, Sept. 1994.
29. F. Pardo, V. A. Aksyuk, S. Arney, H. Bair, N. R. Basavanhally, D. J. Bishop, G. R. Bogart, C. A. Bolle, J. E. Bower, D. Carr, H. B. Chan, R. Cirelli, E. Ferry, R. Frahm, A. Gasparyan, J. V. Gates, C. R. Giles, L. Gomez, S. Goyal, D. S. Greywall, M. Haueis, R. C. Keller, J. Kim, F. P. Klemens, P. Kolodner, A. Kornblit, T. Kroupenkine, W. Lai, V. Lifton, J. Q. Liu, Y. Low, W. Mansfield, D. Marom, J. F. Miner, D. T. Neilson, M. Paczkowski, C.-S. Pai, A. Ramirez, D. Ramsey, S. Rogers, R. Ryf, R. Scotti, H. Shea, M. E. Simon, H. T. Soh, H. Tang, J. A. Taylor, K. Teffeau, J. Vuillemin, and J. Weld, "Optical MEMS devices for telecom systems," in Proc. SPIE's Microtechnologies New Millennium Conf., Canary Islands, Spain, May 19-21, 2003, pp. 511-659.
30. A. Gasparyan, V. A. Aksyuk, P. Busch, and S. Arney, "Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors," in Proc. SPIE MEMS Reliability Critical Applications, Santa Clara, CA, 2000, vol. 4180, pp. 86-90.
31. M. Kozhevnikov, N. R. Basavanhally, J. D. Weld, Y. L. Low, P. R. Kolodner, C. A. Bolle, R. Ryf, A. Gasparyan, A. R. Papazian, A. Olkhovets, J. Kim, D. T. Neilson, V. A. Aksyuk, and J. V. Gates, "Compact 64 × 64 micromechanical optical crossconnect," IEEE Photon. Technol. Lett., vol. 15, pp. 993-995, July 2003.
32. P. H. Malyak, D. L. Kent, P. R. Kolodner, and J. Crawford, "Interferometric measurements of back focal length and insertion loss of precision microlens arrays," in Proc. SPIE Gradient Index, Miniature, Diffractive Optical Systems II, vol. 4437 161, T. J. Suleski, Ed., 2001.
33. L. Erdmann and D. Efferenn, "Technique for monolithic fabrication of silicon microlenses with selectable rim angles," Opt. Eng., vol. 36, no. 4, pp. 1094-1098, 1997.
34. A. Y. Feldblum, K. O. Mersereau, C. R. Nijander, and W. P. Townsend, "Methods for making microlens arrays," U.S. Patent 5 286 338, Feb. 15, 1994.
35. C. Bolle, "Method for compensating for nonuniform etch profiles," U.S.s Patent 6 649 073, Nov. 18, 2003.
36. N. R. Basavanhally, R. E. Scotti, and J. D. Weld, "Fiber array coupler," U.S. Patent 6 633 719, Oct. 14, 2003.
37. R. Capik, J. Hickey, and S. Korotky, "Insertion loss model and input/output losses of single-stage optical cross-connects," in Proc. Optical Fiber Communications Conf. (OFC 2003), vol. 1, Atlanta, GA, 2003, Paper WM2, pp. 386-387.
38. C. F. Lam, M. Boroditsky, B. Desai, and N. J. Frigo, "A novel dynamic crosstalk characterization technique for 3-D photonic crossconnects," IEEE Photon. Technol. Lett., vol. 15, pp. 141-143, Jan. 2003.
39. A. Olkhovets, P. Phanaphat, C. Nuzman, D. J. Shin, C. Lichtenwalner, M. Kozhevnikov, and J. Kim, "Performance of an optical switch based on 3-D MEMS crossconnect," IEEE Photon. Technol. Lett., vol. 16, pp. 780-782, Mar. 2004.