Microelectromechanical scanning devices for optical networking applications

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 2002, Pages 358-359+347

  Wu, Ming C ^a   Hah, Dooyoung ^a   Patterson, Pamela R ^a   Toshiyoshi, Hiroshi ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSTALK; LIGHT POLARIZATION; NATURAL FREQUENCIES; OPTICAL COMMUNICATION; SCANNING; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

MICROELECTROMECHANICAL SCANNING DEVICES; OPTICAL NETWORKING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036110467     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. A high-speed low-voltage stress-induced micromachined 2×2 optical switch
2. MEMS-based photonic switching in communications networks
3. 1296-port MEMS transparent optical crossconnect with 2.07 petabit/s switch capacity
4. Two-dimensional optical scanner with large angular rotation realized by self-assembled micro-elevator
5. Vertical comb array microactuators
6. A flat high-frequency scanning micromirror
7. Improving yield, accuracy and complexity in surface tension self-assembled MOEMS