Technique for monolithic fabrication of silicon microlenses with selectable rim angles

Optical Engineering

Volumn 36, Issue 4, 1997, Pages 1094-1098

  Erdmann, Lars ^a   Efferenn, Dirk ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

Fabrication of microspheres; Microlenses

Indexed keywords

EID: 0141783230     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601300     Document Type: Article

References (8)

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