Conformal AZ5214-E resist deposition on patterned (1 0 0) InP substrates

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 191-197

  Elias P ^a   Gregusova D ^a   Martaus, J ^a   Kostic I ^b  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INSTITUTE OF INFORMATICS   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; DEPOSITION; HYDROGEN BONDS; SURFACE PHENOMENA; SURFACE TENSION; VISCOELASTICITY;

CORRELATION LENGTH; NON-PLANAR DEVICES; RESISTS; ROOT-MEAN-SQUARE ROUGHNESS;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 31344466254     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/001     Document Type: Article

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