Micromachining of mesa and pyramidal-shaped objects in (1 0 0) InP substrates

Journal of Micromechanics and Microengineering

Volumn 15, Issue 5, 2005, Pages 1007-1014

  Elias P ^a   Martaus, J ^a   Soltys J ^a   Kostic I ^b  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INSTITUTE OF INFORMATICS   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; INDIUM COMPOUNDS; MASKS; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; VECTORS;

MASK PATTERNS; MESAS; PYRAMIDAL-SHAPED OBJECTS; UNDERETCHING RATES;

MICROMACHINING;

EID: 24144432240     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/5/016     Document Type: Article

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