Capacitive transducers with curved electrodes

IEEE Sensors Journal

Volumn 6, Issue 1, 2006, Pages 125-138

  McIntosh, Robert B ^a,b,e   Mauger, Philip E ^c   Patterson, Steven R ^d  

^a IEEE   (United States)

^b Nanostructures Inc ^*

^c University of North Carolina   (United States)

^d UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^e Nanostructures Inc   (United States)

Author keywords

Capacitive transducer; Curved electrode; Electret transducer; Electrostatic actuator; Force balanced feedback; Nullbalanced bridge (NBB); Ultrasound transducer

Indexed keywords

CAPACITIVE TRANSDUCERS; CURVED ELECTRODE; ELECTRET TRANSDUCER; FORCE-BLANCED FEEDBACK;

CAPACITANCE; DIELECTRIC FILMS; ELECTRODES; ELECTROSTATIC ACTUATORS; POLYMERIC MEMBRANES; STRESS ANALYSIS;

ULTRASONIC TRANSDUCERS;

EID: 31144457963     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.854137     Document Type: Article

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