One Micron Precision Optically Allgned Method for Hot-Embossing and Nanoimprinting

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 931-935

  Islam, R ^a   Wieder, B ^a   Lindner, P ^b   Glinsner, T ^b   Schaefer, C ^b  

^a EV Group Inc   (United States)

^b EV GROUP   (Austria)

Author keywords

High aspect ratio structures; Hot embossing; Microfluidics; Nanoimprinting; Polymer

Indexed keywords

ASPECT RATIO; BIOMEDICAL ENGINEERING; FLUIDICS; HEATING; MICROMACHINING; MICROSENSORS; MICROSTRUCTURE; OPTICAL SENSORS; POLYMERS; QUARTZ; SILICON WAFERS; VACUUM;

HIGH ASPECT RATIO STRUCTURES; HOT-EMBOSSING TECHNOLOGY; MICROFLUIDICS; NANOIMPRINTING;

NANOTECHNOLOGY;

EID: 1542361341     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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