Self-balanced navigation-grade capacitive microaccelerometers using branched finger electrodes and their performance for varying sense voltage and pressure

Journal of Microelectromechanical Systems

Volumn 12, Issue 1, 2003, Pages 11-20

  Han, Ki Ho ^a   Cho, Young Ho ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Branched finger electrode; Electrical noise; High amplitude sense voltage; Mechanical noise; Navigation grade microaccelerometer; Self force balancing

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRODES; REACTIVE ION ETCHING; SIGNAL TO NOISE RATIO; SPURIOUS SIGNAL NOISE;

ELECTRICAL NOISE; MICROACCELEROMETERS; SELF BALANCED NAVIGATION GRADE CAPACITIVE MICROACCELEROMETERS;

ACCELEROMETERS;

EID: 0037301513     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805043     Document Type: Article

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