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Volumn 13, Issue 5, 2004, Pages 732-736

Reducing Brownian motion in an electrostatically tunable MEMS laser

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FEEDBACK CONTROL; LIGHT EMISSION; MIRRORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR LASERS; SPURIOUS SIGNAL NOISE;

EID: 7244248969     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.836290     Document Type: Article
Times cited : (23)

References (9)
  • 1
    • 0030086347 scopus 로고    scopus 로고
    • Continuously-tunable micromachined vertical-cavity surface-emitting laser with 18 nm wavelength range
    • Feb
    • M. C. Larson, A. R. Massengale, and J. S. Harris Jr., " Continuously-tunable micromachined vertical-cavity surface-emitting laser with 18 nm wavelength range," Electron. Lett., vol. 32, no. 4, pp. 330-2, Feb. 1996.
    • (1996) Electron. Lett. , vol.32 , Issue.4 , pp. 330-332
    • Larson, M.C.1    Massengale, A.R.2    Harris Jr., J.S.3
  • 3
    • 0027591163 scopus 로고
    • Mechanical-thermal noise in micromachined acoustic and vibration sensors
    • May
    • T. B. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, pp. 903-909, May 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 903-909
    • Gabrielson, T.B.1
  • 4
    • 0030110593 scopus 로고    scopus 로고
    • Surface micromachined accelerometers
    • Mar
    • B. E. Boser and R. T. Howe, "Surface micromachined accelerometers," IEEE J. Solid State Circuits, vol. 31, pp. 366-375, Mar. 1996.
    • (1996) IEEE J. Solid State Circuits , vol.31 , pp. 366-375
    • Boser, B.E.1    Howe, R.T.2
  • 5
    • 0036903903 scopus 로고    scopus 로고
    • A vacuum packaged surface micromachined resonant accelerometer
    • Dec
    • A. A. Seshia et al., "A vacuum packaged surface micromachined resonant accelerometer," J. Microelectromech. Syst., vol. 11, pp. 784-793, Dec. 2002.
    • (2002) J. Microelectromech. Syst. , vol.11 , pp. 784-793
    • Seshia, A.A.1
  • 9
    • 0032051056 scopus 로고    scopus 로고
    • Optimal control of ultrasoft cantilevers for force microscopy
    • Apr
    • K. J. Bruland, J. L. Garbini, and W. M. Dougherty, "Optimal control of ultrasoft cantilevers for force microscopy," J. Appl. Phys., vol. 83, no. 8, Apr. 1998.
    • (1998) J. Appl. Phys. , vol.83 , Issue.8
    • Bruland, K.J.1    Garbini, J.L.2    Dougherty, W.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.