Low-temperature synthesis of gallium nitride thin films using electron cyclotron resonance plasma assisted pulsed laser deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 6, 2005, Pages 1633-1637

  Sun, J ^a   Wu, A M ^a   Xu, N ^a   Ying, Z F ^a   Shen, X K ^a   Dong, Z B ^a   Wu, J D ^a   Shi, L Q ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT EMISSION; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; PULSED LASER DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

BAND GAP; MONOATOMIC ATOMS; POLYCRYSTALLINE GAAS;

GALLIUM NITRIDE;

EID: 31144435954     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2091093     Document Type: Article

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