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Volumn 46, Issue 2-4, 2006, Pages 287-292

Simplified quantitative stress-induced leakage current (SILC) model for MOS devices

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTROLYTIC ANALYSIS; MOS DEVICES; NUMERICAL METHODS;

EID: 30844441197     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2005.07.007     Document Type: Article
Times cited : (3)

References (10)
  • 1
    • 0001431712 scopus 로고    scopus 로고
    • Modeling of stress induced leakage current in ultra thin oxides with the trap-assisted tunneling mechanism
    • A. Chou, K. Lai, K. Kumar, P. Chowdhury, and J. Lee Modeling of stress induced leakage current in ultra thin oxides with the trap-assisted tunneling mechanism Appl Phys Lett 70 1997 3407
    • (1997) Appl Phys Lett , vol.70 , pp. 3407
    • Chou, A.1    Lai, K.2    Kumar, K.3    Chowdhury, P.4    Lee, J.5
  • 5
    • 0033080259 scopus 로고    scopus 로고
    • Experimental evidence of inelastic tunneling in stress-induced leakage current
    • S. Takagi, N. Yasuda, and A. Toriumi Experimental evidence of inelastic tunneling in stress-induced leakage current IEEE Trans Electron Dev 46 2 1999 335 341
    • (1999) IEEE Trans Electron Dev , vol.46 , Issue.2 , pp. 335-341
    • Takagi, S.1    Yasuda, N.2    Toriumi, A.3
  • 6
    • 0034274297 scopus 로고    scopus 로고
    • Conduction-band deformation effect on stress-induced leakage current
    • X. Duan, and J.S. Yuan Conduction-band deformation effect on stress-induced leakage current Solid-State Electron 44 2000 1703 1706
    • (2000) Solid-State Electron , vol.44 , pp. 1703-1706
    • Duan, X.1    Yuan, J.S.2
  • 7
    • 84964413902 scopus 로고    scopus 로고
    • A quantitative analysis of stress-induced leakage current in ultra-thin silicon dioxide films
    • T. Endoh A quantitative analysis of stress-induced leakage current in ultra-thin silicon dioxide films IEEE Trans Electron Dev 2001 958 963
    • (2001) IEEE Trans Electron Dev , pp. 958-963
    • Endoh, T.1
  • 8
    • 0031703504 scopus 로고    scopus 로고
    • Deep-trap SILC (stress induced leakage current) model for nominal and weak oxides
    • 1998 IEEE international, March
    • Kamohara S. Park D, Hu C. Deep-trap SILC (stress induced leakage current) model for nominal and weak oxides. In: 36th annual reliability physics symposium proceedings, 1998 IEEE international, March 1998. p. 57-61.
    • (1998) 36th Annual Reliability Physics Symposium Proceedings , pp. 57-61
    • Kamohara Park, S.D.1    Hu, C.2
  • 9
    • 0033080327 scopus 로고    scopus 로고
    • A new I-V model for stress-induced leakage current including inelastic tunneling
    • S. Takagi, N. Yasuda, and A. Toriumi A new I-V model for stress-induced leakage current including inelastic tunneling IEEE Trans Electron Dev 46 2 1999 348 354
    • (1999) IEEE Trans Electron Dev , vol.46 , Issue.2 , pp. 348-354
    • Takagi, S.1    Yasuda, N.2    Toriumi, A.3
  • 10
    • 0033225103 scopus 로고    scopus 로고
    • Emerging oxide degradation mechanisms: Stress induced leakage current (SILC) and quasi-breakdown (QB)
    • G. Ghibaudo, P. Riess, S. Bruyere, B. DeSalvo, C. Jahan, and A. Scarpa Emerging oxide degradation mechanisms: stress induced leakage current (SILC) and quasi-breakdown (QB) Microelectron Eng 49 1999 41 50
    • (1999) Microelectron Eng , vol.49 , pp. 41-50
    • Ghibaudo, G.1    Riess, P.2    Bruyere, S.3    Desalvo, B.4    Jahan, C.5    Scarpa, A.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.